Alcan-Tech Co., Inc.
15Patents
0Active
15Granted
31Portfolio score
Filing activity: Dec 14, 1990 → Sep 18, 1995
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5314538A | Apparatus for manufacturing semiconductor device and method for manufacturing semiconductor device | Emerging Cross-Sectional Technologies | 395 | Expired |
| US5620523A | Apparatus for forming film | Electricity | 143 | Expired |
| US5554570A | Method of forming insulating film | Electricity | 116 | Expired |
| US5387546A | Method for manufacturing a semiconductor device | Emerging Cross-Sectional Technologies | 75 | Expired |
| US5302209A | Apparatus for manufacturing semiconductor device | Electricity | 67 | Expired |
| US5858100A | Substrate holder and reaction apparatus | Chemistry; Metallurgy | 48 | Expired |
| US5051380A | Process for producing semiconductor device | Emerging Cross-Sectional Technologies | 38 | Expired |
| US5484749A | Manufacturing method of semiconductor device | Emerging Cross-Sectional Technologies | 30 | Expired |
| US5281295A | Semiconductor fabrication equipment | Electricity | 22 | Expired |
| US5324539A | Method for forming CVD thin glass films | Electricity | 14 | Expired |
| US5330577A | Semiconductor fabrication equipment | Emerging Cross-Sectional Technologies | 11 | Expired |
| US5679165A | Apparatus for manufacturing semiconductor device | Electricity | 10 | Expired |
| US5532193A | Method for forming insulating film | Electricity | 9 | Expired |
| US5569499A | Method for reforming insulating film | Electricity | 6 | Expired |
| US5589001A | Apparatus for forming a film on a wafer | Chemistry; Metallurgy | 3 | Expired |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.