Patent assignee · US · COMPANY

Numerical Technologies, Inc.

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78Patents
0Active
78Granted
38Portfolio score

Filing activity: Sep 17, 1997 → Oct 14, 2003

Most-cited patents

PatentTitleAreaCited byStatus
US6470489B1 Design rule checking system and method Physics 399 Expired
US5858580A Phase shifting circuit manufacture method and apparatus Physics 359 Expired
US6370679B1 Data hierarchy layout correction and verification method and apparatus Physics 346 Expired
US6505327B2 Generating an instance-based representation of a design hierarchy Physics 227 Expired
US6745372B2 Method and apparatus for facilitating process-compliant layout optimization Emerging Cross-Sectional Technologies 220 Expired
US6928635B2 Selectively applying resolution enhancement techniques to improve performance and manufacturing cost of integrated circuits Physics 217 Expired
US6807663B2 Accelerated layout processing using OPC pre-processing Physics 210 Expired
US6687895B2 Method and apparatus for reducing optical proximity correction output file size Physics 204 Expired
US6777138B2 Mask product made by selection of evaluation point locations based on proximity effects model amplitudes for correcting proximity effects in a fabricat layout Emerging Cross-Sectional Technologies 200 Expired
US6453457B1 Selection of evaluation point locations based on proximity effects model amplitudes for correcting proximity effects in a fabrication layout Emerging Cross-Sectional Technologies 166 Expired
US6757645B2 Visual inspection and verification system Physics 128 Expired
US6453452B1 Method and apparatus for data hierarchy maintenance in a system for mask description Physics 110 Expired
US6578188B1 Method and apparatus for a network-based mask defect printability analysis system Emerging Cross-Sectional Technologies 85 Expired
US6228539A Phase shifting circuit manufacture method and apparatus Physics 79 Expired
US6258493A Phase shifting circuit manufacture method and apparatus Physics 71 Expired
US6523162B1 General purpose shape-based layout processing scheme for IC layout modifications Physics 64 Expired
US6665856B1 Displacing edge segments on a fabrication layout based on proximity effects model amplitudes for correcting proximity effects Physics 64 Expired
US6658640B2 Simulation-based feed forward process control Physics 62 Expired
US6753115B2 Facilitating minimum spacing and/or width control optical proximity correction Physics 57 Expired
US6436590B1 Phase shifting circuit manufacture method and apparatus Physics 56 Expired
US6420074B2 Phase shifting circuit manufacture method and apparatus Physics 52 Expired
US6625801B1 Dissection of printed edges from a fabrication layout for correcting proximity effects Emerging Cross-Sectional Technologies 51 Expired
US6560766B2 Method and apparatus for analyzing a layout using an instance-based representation Physics 49 Expired
US6684382B2 Microloading effect correction Physics 49 Expired
US6787271B2 Design and layout of phase shifting photolithographic masks Physics 48 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.