Inventor · San Francisco, CA, US

Andrew Lam

9Patents
4h-index
19Co-inventors
46Inventor score

Filing activity: Jul 6, 2004 → Feb 27, 2009

Most-cited inventions

PatentTitleAreaCited byStatus
US7494545B2 Epitaxial deposition process and apparatus Electricity 241 Expired
US7897495B2 Formation of epitaxial layer containing silicon and carbon Electricity 124 Active
US7488690B2 Silicon nitride film with stress control Electricity 9 Expired
US7588980B2 Methods of controlling morphology during epitaxial layer formation Electricity 7 Active
US7772074B2 Method of forming conformal silicon layer for recessed source-drain Electricity 3 Active
US7776698B2 Selective formation of silicon carbon epitaxial layer Electricity 3 Active
US9064960B2 Selective epitaxy process control Electricity 2 Active
US7718225B2 Method to control semiconductor film deposition characteristics Electricity 2 Active
US8991332B2 Apparatus to control semiconductor film deposition characteristics Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.