Inventor · Gloucester, MA, US

Christopher J. Leavitt

16Patents
4h-index
20Co-inventors
56Inventor score

Filing activity: Apr 3, 2009 → Mar 5, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8698107B2 Technique and apparatus for monitoring ion mass, energy, and angle in processing systems Electricity 22 Active
US8354655B2 Method and system for controlling critical dimension and roughness in resist features Electricity 5 Active
US8623171B2 Plasma processing apparatus Electricity 5 Active
US9711316B2 Method of cleaning an extraction electrode assembly using pulsed biasing Electricity 4 Active
US8461554B1 Apparatus and method for charge neutralization during processing of a workpiece Electricity 3 Active
US9034743B2 Method for implant productivity enhancement Electricity 3 Active
US9865430B2 Boron implanting using a co-gas Electricity 2 Active
US9677171B2 Method of improving ion beam quality in a non-mass-analyzed ion implantation system Electricity 2 Active
US9840772B2 Method of improving ion beam quality in a non-mass-analyzed ion implantation system Electricity 2 Active
US8907307B2 Apparatus and method for maskless patterned implantation Electricity 1 Active
US8669538B1 Method of improving ion beam quality in an implant system Electricity 1 Active
US10290466B2 Boron implanting using a co-gas Electricity 1 Active
US8698109B2 Method and system for controlling critical dimension and roughness in resist features Electricity 0 Active
US11120973B2 Plasma processing apparatus and techniques Electricity 0 Active
US11615945B2 Plasma processing apparatus and techniques Electricity 0 Active
US12165852B2 Cover ring to mitigate carbon contamination in plasma doping chamber Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.