Daigi KAMIMURA
17Patents
3h-index
15Co-inventors
53Inventor score
Filing activity: Sep 19, 2014 → Oct 13, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| USD939459S1 | Boat for wafer processing apparatus | General | 13 | Active |
| US10636681B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 5 | Active |
| US10508336B2 | Substrate processing apparatus | Electricity | 3 | Active |
| US11015248B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 3 | Active |
| US11062918B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 2 | Active |
| US10998205B2 | Substrate processing apparatus and manufacturing method of semiconductor device | Electricity | 2 | Active |
| US11555246B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 2 | Active |
| US11450536B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 1 | Active |
| US11935762B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Electricity | 1 | Active |
| US9966289B2 | Substrate processing apparatus, method for manufacturing semiconductor device, and non-transitory computer-readable recording medium | Electricity | 1 | Active |
| US11456190B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 0 | Active |
| US11823946B2 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Electricity | 0 | Active |
| US12116666B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 0 | Active |
| US10529605B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and recording medium | Electricity | 0 | Active |
| US11512392B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US12293939B2 | Method of manufacturing semiconductor device, substrate processing apparatus and non-transitory computer-readable recording medium | Electricity | 0 | Active |
| US12123091B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.