David Trussell
19Patents
7h-index
20Co-inventors
66Inventor score
Filing activity: Jul 9, 1996 → Jul 8, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7169256B2 | Plasma processor with electrode responsive to multiple RF frequencies | Electricity | 49 | Expired |
| US5911833A | Method of in-situ cleaning of a chuck within a plasma chamber | Emerging Cross-Sectional Technologies | 25 | Expired |
| US7430986B2 | Plasma confinement ring assemblies having reduced polymer deposition characteristics | Emerging Cross-Sectional Technologies | 18 | Expired |
| US7861667B2 | Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode | Electricity | 16 | Active |
| US5988187A | Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports | Electricity | 13 | Expired |
| US9502275B1 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | Electricity | 8 | Active |
| US10403476B2 | Active showerhead | Electricity | 8 | Active |
| US8262922B2 | Plasma confinement rings having reduced polymer deposition characteristics | Emerging Cross-Sectional Technologies | 5 | Active |
| US10804079B2 | Active showerhead | Electricity | 3 | Active |
| US8500952B2 | Plasma confinement rings having reduced polymer deposition characteristics | Emerging Cross-Sectional Technologies | 2 | Active |
| US11112773B2 | Systems for removing and replacing consumable parts from a semiconductor process module in situ | Emerging Cross-Sectional Technologies | 2 | Active |
| US11393705B2 | Wafer transport assembly with integrated buffers | Electricity | 1 | Active |
| US8573153B2 | Multi-part electrode for a semiconductor processing plasma reactor and method of replacing a portion of a multi-part electrode | Electricity | 1 | Active |
| USRE38097E1 | Chemical vapor deposition system with a plasma chamber having separate process gas and cleaning gas injection ports | General | 0 | Expired |
| US10790174B2 | Wafer transport assembly with integrated buffers | Electricity | 0 | Active |
| US10014196B2 | Wafer transport assembly with integrated buffers | Electricity | 0 | Active |
| US9929028B2 | Service tunnel for use on capital equipment in semiconductor manufacturing and research fabs | Electricity | 0 | Active |
| US10304707B2 | Load lock interface and integrated post-processing module | Electricity | 0 | Active |
| US11764086B2 | Wafer transport assembly with integrated buffers | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.