Inventor · Singapore, SG

Feng Chen

25Patents
10h-index
48Co-inventors
75Inventor score

Filing activity: Oct 8, 1999 → Jun 18, 2024

Most-cited inventions

PatentTitleAreaCited byStatus
US6376376B1 Method to prevent CU dishing during damascene formation Electricity 43 Expired
US6284644A IMD scheme by post-plasma treatment of FSG and TEOS oxide capping layer Electricity 27 Expired
US6204137A Method to form transistors and local interconnects using a silicon nitride dummy gate technique Electricity 24 Expired
US6306723A Method to form shallow trench isolations without a chemical mechanical polish Electricity 24 Expired
US6281082A Method to form MOS transistors with a common shallow trench isolation and interlevel dielectric gap fill Electricity 23 Expired
US6103569A Method for planarizing local interconnects Electricity 12 Expired
US6274485A Method to reduce dishing in metal chemical-mechanical polishing Electricity 11 Expired
US6664190B2 Pre STI-CMP planarization scheme Electricity 11 Expired
US7446039B2 Integrated circuit system with dummy region Emerging Cross-Sectional Technologies 10 Active
US6451687B1 Intermetal dielectric layer for integrated circuits Electricity 10 Expired
US6613649B2 Method for buffer STI scheme with a hard mask layer as an oxidation barrier Electricity 8 Expired
US6376378B1 Polishing apparatus and method for forming an integrated circuit Electricity 7 Expired
US6443809B1 Polishing apparatus and method for forming an integrated circuit Performing Operations; Transporting 3 Expired
US6613648B1 Shallow trench isolation using TEOS cap and polysilicon pullback Electricity 2 Expired
US9956656B2 Electronic cigarette atomizer oiling and labeling device Emerging Cross-Sectional Technologies 1 Active
US7060573B2 Extended poly buffer STI scheme Electricity 1 Expired
US6528886B2 Intermetal dielectric layer for integrated circuits Electricity 1 Expired
US7156726B1 Polishing apparatus and method for forming an integrated circuit Performing Operations; Transporting 1 Expired
US6964598B1 Polishing apparatus and method for forming an integrated circuit Electricity 1 Expired
US12313183B1 Controller for electromagnetic valve, water treatment device and gas cooker Mechanical Engineering; Lighting; Heating 0 Active
US12369635B2 Vaporizer and ceramic vaporization core thereof and method for fabricating ceramic vaporization core Electricity 0 Active
US12077459B2 Device and method for mud solidification based on electro-osmosis well points cooperating with well-points dewatering Fixed Constructions 0 Active
US12122724B2 Composite ceramic member and method for preparation thereof, vaporization assembly, and electronic cigarette Chemistry; Metallurgy 0 Active
US7741719B2 Integrated circuit system with dummy region Emerging Cross-Sectional Technologies 0 Active
US8536635B1 Semiconductor structure and fabrication method thereof Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.