Inventor · Singapore, SG

Han-Guan Chew

12Patents
3h-index
17Co-inventors
49Inventor score

Filing activity: May 21, 2008 → Oct 21, 2013

Most-cited inventions

PatentTitleAreaCited byStatus
US8304831B2 Method and apparatus of forming a gate Electricity 14 Active
US8835294B2 Method for improving thermal stability of metal gate Electricity 7 Active
US8304842B2 Interconnection structure for N/P metal gates Electricity 7 Active
US8378428B2 Metal gate structure of a semiconductor device Electricity 3 Active
US8609484B2 Method for forming high-K metal gate device Electricity 3 Active
US8586428B2 Interconnection structure for N/P metal gates Electricity 3 Active
US9105692B2 Method of fabricating an interconnection structure in a CMOS comprising a step of forming a dummy electrode Electricity 2 Active
US8668833B2 Method of forming a nanostructure Emerging Cross-Sectional Technologies 1 Active
US8664079B2 Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate Electricity 0 Active
US8143137B2 Method of fabricating semiconductor device by thinning hardmask layers on frontside and backside of substrate Electricity 0 Active
US9355874B2 Silicon nitride etching in a single wafer apparatus Electricity 0 Active
US8415236B2 Methods for reducing loading effects during film formation Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.