Hideki Yabe
11Patents
5h-index
43Co-inventors
62Inventor score
Filing activity: Apr 24, 1995 → Apr 13, 2006
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6265113A | Stress adjustment method of X-ray mask | Physics | 325 | Expired |
| US6110291A | Thin film forming apparatus using laser | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5677090A | Method of making X-ray mask having reduced stress | Performing Operations; Transporting | 12 | Expired |
| US6212252A | X-ray mask provided with an alignment mark and method of manufacturing the same | Physics | 8 | Expired |
| US5496667A | X-ray mask and its fabrication method | Physics | 7 | Expired |
| US5905005A | X-ray mask and method of fabricating the same | Physics | 5 | Expired |
| US5953492A | Method of manufacturing X-ray mask and heating apparatus | Physics | 4 | Expired |
| US5834142A | Method of manufacturing X-ray mask and heating apparatus | Physics | 2 | Expired |
| US6898267B2 | X-ray mask | Physics | 2 | Expired |
| US5879840A | Film-forming method for X-ray mask | Chemistry; Metallurgy | 2 | Expired |
| US7350406B2 | Sensor chip breaking strength inspection apparatus and sensor chip breaking strength inspection method | Physics | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.