Inventor · Menlo Park, CA, US

James Wiley

25Patents
9h-index
48Co-inventors
75Inventor score

Filing activity: Sep 19, 1997 → Apr 25, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6529621B1 Mechanisms for making and inspecting reticles Physics 78 Expired
US6076465A System and method for determining reticle defect printability Physics 76 Expired
US7853920B2 Method for detecting, sampling, analyzing, and correcting marginal patterns in integrated circuit manufacturing Physics 49 Active
US7695876B2 Method for identifying and using process window signature patterns for lithography process control Physics 42 Active
US6748103B2 Mechanisms for making and inspecting reticles Physics 41 Expired
US8057967B2 Process window signature patterns for lithography process control Physics 27 Active
US6516085B1 Apparatus and methods for collecting global data during a reticle inspection Physics 21 Expired
US8056028B2 Method of performing mask-writer tuning and optimization Physics 12 Active
US6654489B2 Apparatus and methods for collecting global data during a reticle inspection Physics 10 Expired
US9002497B2 Methods and systems for inspection of wafers and reticles using designer intent data Physics 8 Active
US6381358B1 System and method for determining reticle defect printability Physics 7 Expired
US8318391B2 Process window signature patterns for lithography process control Physics 6 Active
US10139725B2 Lithographic apparatus Physics 6 Active
US10571800B2 Mask assembly and associated methods Physics 5 Active
US6731787B1 System and method for determining reticle defect printability Physics 3 Expired
US10466585B2 Pellicle and pellicle assembly Physics 2 Active
US11029595B2 Mask assembly and associated methods Physics 1 Active
US11086213B2 Mask assembly and associated methods Physics 1 Active
US10983431B2 Pellicle and pellicle assembly Physics 0 Active
US12066758B2 Pellicle and pellicle assembly Physics 0 Active
US10713771B2 Methods and systems for inspection of wafers and reticles using designer intent data Physics 0 Active
US11287748B2 Guided patterning device inspection Physics 0 Active
US11347142B2 Pellicle and pellicle assembly Physics 0 Active
US11635681B2 Mask assembly and associated methods Physics 0 Active
US11348222B2 Methods and systems for inspection of wafers and reticles using designer intent data Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.