Inventor · Yamanashi, JP

Jun LIN

12Patents
1h-index
25Co-inventors
50Inventor score

Filing activity: May 17, 2007 → Aug 17, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9991138B2 Etching method and etching apparatus Electricity 321 Active
US10199268B2 Film forming method and film forming system Electricity 1 Active
US8263432B2 Material composition having core-shell microstructure used for varistor Emerging Cross-Sectional Technologies 1 Active
US10460946B2 Naturally oxidized film removing method and naturally oxidized film removing device Electricity 1 Active
US11282714B2 Etching method and etching device Electricity 0 Active
US8163174B2 Submerged biofiltration purifying apparatus Emerging Cross-Sectional Technologies 0 Active
US10998199B2 Etching method and etching apparatus Electricity 0 Active
US10734242B2 Substrate processing method and substrate processing apparatus Electricity 0 Active
US11791175B2 Etching method and etching apparatus Electricity 0 Active
US10734243B2 Etching method and substrate processing system Electricity 0 Active
US11189498B2 Method of etching silicon-containing film, computer-readable storage medium, and apparatus for etching silicon-containing film Electricity 0 Active
US12381096B2 Etching method and etching apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.