Katsushige Harada
13Patents
3h-index
31Co-inventors
56Inventor score
Filing activity: Aug 13, 2003 → Jul 30, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US8896097B2 | Method of manufacturing capacitor, capacitor and method of forming dielectric film for use in capacitor | Electricity | 13 | Active |
| US9230799B2 | Method for fabricating semiconductor device and the semiconductor device | Electricity | 10 | Active |
| US7041546B2 | Film forming method for depositing a plurality of high-k dielectric films | Electricity | 3 | Expired |
| US9234275B2 | Method and apparatus of forming metal compound film, and electronic product | Electricity | 2 | Active |
| US9293543B2 | Film forming method and film forming apparatus | Electricity | 2 | Active |
| US7968472B2 | Film forming method and film forming apparatus | Electricity | 2 | Active |
| US7368384B2 | Film formation apparatus and method of using the same | Emerging Cross-Sectional Technologies | 2 | Expired |
| US8336487B2 | Film forming apparatus | Electricity | 1 | Active |
| US9574269B2 | Method and apparatus for forming thin film | Chemistry; Metallurgy | 1 | Active |
| US11486043B2 | Metal contamination prevention method and apparatus, and substrate processing method using the same and apparatus therefor | Chemistry; Metallurgy | 0 | Active |
| US8642127B2 | Method of forming titanium nitride film | Electricity | 0 | Active |
| US8389421B2 | Film formation method and film formation apparatus | Electricity | 0 | Active |
| US8815112B2 | Liquid processing method, recording medium having recorded program for executing liquid processing method therein and liquid processing apparatus | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.