Inventor · Yokohama, JP

Kota Funayama

37Patents
11h-index
71Co-inventors
78Inventor score

Filing activity: Jul 29, 1999 → Feb 28, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US6090684A Method for manufacturing semiconductor device Emerging Cross-Sectional Technologies 156 Expired
US9754963B1 Multi-tier memory stack structure containing two types of support pillar structures Electricity 63 Active
US6670642B2 Semiconductor memory device using vertical-channel transistors Electricity 56 Expired
US9978766B1 Three-dimensional memory device with electrically isolated support pillar structures and method of making thereof Electricity 36 Active
US9691781B1 Vertical resistor in 3D memory device with two-tier stack Electricity 32 Active
US9780034B1 Three-dimensional memory device containing annular etch-stop spacer and method of making thereof Electricity 27 Active
US7098478B2 Semiconductor memory device using vertical-channel transistors Electricity 26 Expired
US10224240B1 Distortion reduction of memory openings in a multi-tier memory device through thermal cycle control Electricity 24 Active
US9929174B1 Three-dimensional memory device having non-uniform spacing among memory stack structures and method of making thereof Electricity 21 Active
US7348230B2 Manufacturing method of semiconductor device Electricity 21 Expired
US9859363B2 Self-aligned isolation dielectric structures for a three-dimensional memory device Electricity 13 Active
US10600802B2 Multi-tier memory device with rounded top part of joint structure and methods of making the same Electricity 11 Active
US8853036B2 Semiconductor device and method of manufacturing the same Electricity 6 Active
US6943373B2 Semiconductor memory device using vertical-channel transistors Electricity 5 Expired
US10658377B2 Three-dimensional memory device with reduced etch damage to memory films and methods of making the same Electricity 5 Active
US8633530B2 Semiconductor device and method of manufacturing the same Electricity 4 Active
US9093546B2 Method of manufacturing semiconductor device and semiconductor device Electricity 4 Active
US6403446B1 Method for manufacturing semiconductor device Emerging Cross-Sectional Technologies 3 Expired
US8133795B2 Method of manufacturing semiconductor integrated circuit device Physics 3 Active
US7045864B2 Semiconductor integrated circuit device Emerging Cross-Sectional Technologies 3 Expired
US8461642B2 Semiconductor device having a nonvolatile memory cell with field effect transistors Electricity 3 Active
US9941297B2 Vertical resistor in 3D memory device with two-tier stack Electricity 3 Active
US9443991B2 Semiconductor device and method of manufacturing the same Electricity 3 Active
US8569144B2 Method of manufacturing semiconductor integrated circuit device Physics 3 Active
US9324883B2 Semiconductor device and method of manufacturing the same Electricity 2 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.