Martin Ebert
28Patents
6h-index
35Co-inventors
69Inventor score
Filing activity: May 2, 2000 → Jan 10, 2023
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6952258B2 | Wafer chuck with integrated reference sample | Physics | 58 | Expired |
| US6952261B2 | System for performing ellipsometry using an auxiliary pump beam to reduce effective measurement spot size | Physics | 14 | Expired |
| US6747746B2 | System and method for finding the center of rotation of an R-theta stage | Physics | 12 | Expired |
| US10133188B2 | Metrology method, target and substrate | Physics | 9 | Active |
| US8830472B2 | Method of assessing a model of a substrate, an inspection apparatus and a lithographic apparatus | Physics | 8 | Active |
| US10379445B2 | Metrology method, target and substrate | Physics | 6 | Active |
| US6757059B2 | Wafer chuck with integrated reference sample | Physics | 5 | Expired |
| US6798512B2 | Multiple beam ellipsometer | Physics | 5 | Expired |
| USD488767S1 | Convertible top for an automobile | General | 4 | Expired |
| US6624403B2 | Autofocus system | Physics | 3 | Expired |
| US7697135B1 | Scanning focal length metrology | Physics | 3 | Active |
| US10254658B2 | Metrology method, target and substrate | Physics | 3 | Active |
| US7342661B2 | Method for noise improvement in ellipsometers | Physics | 2 | Expired |
| US7321427B2 | Multiple beam ellipsometer | Physics | 1 | Active |
| US6411381B1 | Method of reducing noise generated by arc lamps in optical systems employing slits | Physics | 1 | Expired |
| US9753296B2 | Illumination system, inspection apparatus including such an illumination system, inspection method and manufacturing method | Physics | 1 | Active |
| US7030984B2 | Fast wafer positioning method for optical metrology | Physics | 1 | Expired |
| US11580274B2 | Method and apparatus for inspection and metrology | Physics | 1 | Active |
| US11429029B2 | Method and apparatus for illumination adjustment | Physics | 0 | Active |
| US10620550B2 | Metrology method and apparatus | Physics | 0 | Active |
| US8259296B1 | Scanning focal length metrology | Physics | 0 | Active |
| US12189182B2 | Photonic chip and method of manufacture | Physics | 0 | Active |
| US6985228B2 | Multiple beam ellipsometer | Physics | 0 | Expired |
| US12339493B2 | Photonic chip and method of manufacture | Physics | 0 | Active |
| US7136164B2 | Multiple beam ellipsometer | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.