Inventor · Rifu, JP

Masahiro Tabata

48Patents
3h-index
23Co-inventors
63Inventor score

Filing activity: Sep 17, 1997 → Jun 2, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7722257B2 Roller bearing cage and tapered roller bearing Mechanical Engineering; Lighting; Heating 14 Active
US5903526A Magneto-optical recording medium having multiple magnetic layers Physics 4 Expired
US10381236B2 Method of processing target object Electricity 4 Active
US10319613B2 Method of selectively etching first region made of silicon nitride against second region made of silicon oxide Electricity 3 Active
US8063002B2 Rolling device and rolling device manufacturing method Mechanical Engineering; Lighting; Heating 2 Active
US11289339B2 Plasma processing method and plasma processing apparatus Electricity 1 Active
US8202006B2 Sealing device, rolling bearing, and rolling bearing for wheel Mechanical Engineering; Lighting; Heating 1 Active
US10553446B2 Method of processing target object Electricity 1 Active
US10755944B2 Etching method and plasma processing apparatus Electricity 1 Active
US11133192B2 Workpiece processing method Electricity 1 Active
US10600660B2 Method of selectively etching first region made of silicon nitride against second region made of silicon oxide Electricity 1 Active
US7126884B2 Magneto-optical recording medium having multiple magnetic layers Physics 1 Expired
US7926817B2 Sealing apparatus and bearing apparatus having the same Mechanical Engineering; Lighting; Heating 1 Active
US11574814B2 Substrate and substrate processing method Emerging Cross-Sectional Technologies 0 Active
US11637025B2 Apparatus for selectively etching first region made of silicon nitride against second region made of silicon oxide Electricity 0 Active
US11594422B2 Film etching method for etching film Electricity 0 Active
US10777425B2 Method of processing substrate Electricity 0 Active
US11139175B2 Method of processing target object Electricity 0 Active
US10269578B2 Etching method Electricity 0 Active
US10672605B2 Film forming method Electricity 0 Active
US8557904B2 Sealing device Mechanical Engineering; Lighting; Heating 0 Active
US10504741B2 Semiconductor manufacturing method and plasma processing apparatus Electricity 0 Active
US11145518B2 Method and apparatus for etching target object Electricity 0 Active
US10916420B2 Processing method and plasma processing apparatus Electricity 0 Active
US12308241B2 Plasma processing method and plasma processing apparatus Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.