Mikio Nishio
16Patents
10h-index
12Co-inventors
65Inventor score
Filing activity: Sep 24, 1991 → Oct 4, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5645628A | Electroless plating bath used for forming a wiring of a semiconductor device, and method of forming a wiring of a semiconductor device | Chemistry; Metallurgy | 162 | Expired |
| US6012967A | Polishing method and polishing apparatus | Electricity | 65 | Expired |
| US5769697A | Method and apparatus for polishing semiconductor substrate | Performing Operations; Transporting | 53 | Expired |
| US5223729A | Semiconductor device and a method of producing the same | Electricity | 38 | Expired |
| US5997385A | Method and apparatus for polishing semiconductor substrate | Performing Operations; Transporting | 31 | Expired |
| US5795828A | Electroless plating bath used for forming a wiring of a semiconductor device, and method of forming a wiring of a semiconductor device | Chemistry; Metallurgy | 25 | Expired |
| US5921853A | Apparatus for polishing substrate using resin film or multilayer polishing pad | Performing Operations; Transporting | 25 | Expired |
| US5791973A | Apparatus for holding substrate to be polished and apparatus and method for polishing substrate | Performing Operations; Transporting | 25 | Expired |
| US6074289A | Apparatus for holding substrate to be polished | Electricity | 12 | Expired |
| US6099390A | Polishing pad for semiconductor wafer and method for polishing semiconductor wafer | Performing Operations; Transporting | 11 | Expired |
| US5866480A | Method and apparatus for polishing semiconductor substrate | Performing Operations; Transporting | 10 | Expired |
| US5451261A | Metal film deposition apparatus and metal film deposition method | Emerging Cross-Sectional Technologies | 9 | Expired |
| US5939132A | Alignment chips positioned in the peripheral part of the semiconductor substrate and method of manufacturing thereof | Emerging Cross-Sectional Technologies | 8 | Expired |
| US5683921A | Semiconductor device and method of manufacturing the same | Electricity | 6 | Expired |
| US6812493B2 | Thin-film semiconductor element and method of producing same | Electricity | 2 | Expired |
| US5868610A | Mehtod and aparatus for polishing semiconductor substrate | Performing Operations; Transporting | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.