Inventor · Osaka, JP

Mikio Nishio

16Patents
10h-index
12Co-inventors
65Inventor score

Filing activity: Sep 24, 1991 → Oct 4, 2002

Most-cited inventions

PatentTitleAreaCited byStatus
US5645628A Electroless plating bath used for forming a wiring of a semiconductor device, and method of forming a wiring of a semiconductor device Chemistry; Metallurgy 162 Expired
US6012967A Polishing method and polishing apparatus Electricity 65 Expired
US5769697A Method and apparatus for polishing semiconductor substrate Performing Operations; Transporting 53 Expired
US5223729A Semiconductor device and a method of producing the same Electricity 38 Expired
US5997385A Method and apparatus for polishing semiconductor substrate Performing Operations; Transporting 31 Expired
US5795828A Electroless plating bath used for forming a wiring of a semiconductor device, and method of forming a wiring of a semiconductor device Chemistry; Metallurgy 25 Expired
US5921853A Apparatus for polishing substrate using resin film or multilayer polishing pad Performing Operations; Transporting 25 Expired
US5791973A Apparatus for holding substrate to be polished and apparatus and method for polishing substrate Performing Operations; Transporting 25 Expired
US6074289A Apparatus for holding substrate to be polished Electricity 12 Expired
US6099390A Polishing pad for semiconductor wafer and method for polishing semiconductor wafer Performing Operations; Transporting 11 Expired
US5866480A Method and apparatus for polishing semiconductor substrate Performing Operations; Transporting 10 Expired
US5451261A Metal film deposition apparatus and metal film deposition method Emerging Cross-Sectional Technologies 9 Expired
US5939132A Alignment chips positioned in the peripheral part of the semiconductor substrate and method of manufacturing thereof Emerging Cross-Sectional Technologies 8 Expired
US5683921A Semiconductor device and method of manufacturing the same Electricity 6 Expired
US6812493B2 Thin-film semiconductor element and method of producing same Electricity 2 Expired
US5868610A Mehtod and aparatus for polishing semiconductor substrate Performing Operations; Transporting 2 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.