Mitsuru Ushijima
13Patents
8h-index
14Co-inventors
69Inventor score
Filing activity: Feb 10, 1989 → Nov 19, 2009
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5393624A | Method and apparatus for manufacturing a semiconductor device | Physics | 125 | Expired |
| US4985722A | Apparatus for coating a photo-resist film and/or developing it after being exposed | Emerging Cross-Sectional Technologies | 112 | Expired |
| US5442416A | Resist processing method | Emerging Cross-Sectional Technologies | 90 | Expired |
| US5202716A | Resist process system | Electricity | 81 | Expired |
| US5002008A | Coating apparatus and method for applying a liquid to a semiconductor wafer, including selecting a nozzle in a stand-by state | Performing Operations; Transporting | 67 | Expired |
| US5177514A | Apparatus for coating a photo-resist film and/or developing it after being exposed | Emerging Cross-Sectional Technologies | 60 | Expired |
| US5339128A | Resist processing method | Emerging Cross-Sectional Technologies | 54 | Expired |
| US5089305A | Coating apparatus and method for applying a liquid to a semiconductor wafer including selecting a nozzle on a stand by state | Performing Operations; Transporting | 47 | Expired |
| US6378078B1 | Semiconductor integrated circuit supervising an illicit address operation | Physics | 4 | Expired |
| US7169283B2 | Anodization device and anodization method | Emerging Cross-Sectional Technologies | 2 | Expired |
| US7569124B2 | Anodic oxidation apparatus | Emerging Cross-Sectional Technologies | 1 | Active |
| US7118663B2 | Anodic oxidizer, anodic oxidation method | Electricity | 0 | Expired |
| US8574676B2 | Substrate processing method | Electricity | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.