Inventor · Santa Clara, CA, US

Mohan Mahadevan

26Patents
7h-index
88Co-inventors
68Inventor score

Filing activity: Sep 19, 2008 → Jun 1, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US8126255B2 Systems and methods for creating persistent data for a wafer and for using persistent data for inspection-related functions Physics 146 Active
US8223327B2 Systems and methods for detecting defects on a wafer Physics 21 Active
US10395362B2 Contour based defect detection Electricity 18 Active
US10360477B2 Accelerating semiconductor-related computations using learning based models Physics 14 Active
US9734568B2 Automated inline inspection and metrology using shadow-gram images Physics 13 Active
US10733744B2 Learning based approach for aligning images acquired with different modalities Electricity 10 Active
US9772297B2 Apparatus and methods for combined brightfield, darkfield, and photothermal inspection Physics 9 Active
US9645097B2 In-line wafer edge inspection, wafer pre-alignment, and wafer cleaning Physics 6 Active
US8467047B2 Systems and methods for detecting defects on a wafer Physics 5 Active
US11657631B2 Scalable, flexible and robust template-based data extraction pipeline Physics 4 Active
US10607119B2 Unified neural network for defect detection and classification Physics 4 Active
US9880107B2 Systems and methods for detecting defects on a wafer Physics 3 Active
US9640449B2 Automated inline inspection of wafer edge strain profiles using rapid photoreflectance spectroscopy Physics 3 Active
US10605744B2 Systems and methods for detecting defects on a wafer Physics 2 Active
US11580375B2 Accelerated training of a machine learning based model for semiconductor applications Physics 2 Active
US10533954B2 Apparatus and methods for combined brightfield, darkfield, and photothermal inspection Physics 1 Active
US12205294B2 Methods and systems for authentication of a physical document Physics 1 Active
US11237872B2 Semiconductor inspection and metrology systems for distributing job among the CPUs or GPUs based on logical image processing boundaries Physics 1 Active
US10290088B2 Wafer and lot based hierarchical method combining customized metrics with a global classification methodology to monitor process tool condition at extremely high throughput Emerging Cross-Sectional Technologies 0 Active
US9360863B2 Data perturbation for wafer inspection or metrology setup using a model of a difference Emerging Cross-Sectional Technologies 0 Active
US12067796B2 Method for detecting fraud in documents Physics 0 Active
US12183107B2 Signal-based machine learning fraud detection Physics 0 Active
US9053390B2 Automated inspection scenario generation Physics 0 Active
US12423788B2 Generalized anomaly detection Physics 0 Active
US9569834B2 Automated image-based process monitoring and control Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.