Inventor · Merrimack, NH, US

Neil K. Colvin

32Patents
4h-index
24Co-inventors
59Inventor score

Filing activity: Oct 11, 2006 → Jun 30, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9006690B2 Extraction electrode assembly voltage modulation in an ion implantation system Electricity 6 Active
US11170967B2 Liquid metal ion source Electricity 6 Active
US8604418B2 In-vacuum beam defining aperture cleaning for particle reduction Electricity 5 Active
US9543110B2 Reduced trace metals contamination ion source for an ion implantation system Electricity 5 Active
US10087520B2 Implantation using solid aluminum iodide (AlI3) for producing atomic aluminum ions and in situ cleaning of aluminum iodide and associated by-products Electricity 4 Active
US7655930B2 Ion source arc chamber seal Electricity 3 Active
US10074508B2 Low conductance self-shielding insulator for ion implantation systems Electricity 3 Active
US10170286B2 In-situ cleaning using hydrogen peroxide as co-gas to primary dopant or purge gas for minimizing carbon deposits in an ion source Electricity 2 Active
US8779395B2 Automatic control system for selection and optimization of co-gas flow levels Electricity 2 Active
US7683348B2 Sensor for ion implanter Electricity 2 Active
US10679818B2 Low conductance self-shielding insulator for ion implantation systems Electricity 1 Active
US9870893B2 Multi-piece electrode aperture Electricity 1 Active
US10847339B2 Hydrogen generator for an ion implanter Electricity 1 Active
US10361069B2 Ion source repeller shield comprising a labyrinth seal Electricity 1 Active
US11756772B2 System and method for extending a lifetime of an ion source for molecular carbon implants Electricity 0 Active
US12154763B2 Hydraulic feed system for an ion source Electricity 0 Active
US11699565B2 Fluorine based molecular co-gas when running dimethylaluminum chloride as a source material to generate an aluminum ion beam Electricity 0 Active
US9984855B2 Implementation of co-gases for germanium and boron ion implants Electricity 0 Active
US10535498B2 Lanthanated tungsten ion source and beamline components Electricity 0 Active
US9941087B2 Ion source cathode shield Electricity 0 Active
US11699563B2 Etching aluminum nitride or aluminum oxide to generate an aluminum ion beam Electricity 0 Active
US11062873B2 Hydrogen bleed gas for an ion source housing Electricity 0 Active
US10361081B2 Phosphine co-gas for carbon implants Electricity 0 Active
US11728140B1 Hydraulic feed system for an ion source Electricity 0 Active
US10256069B2 Phosphorous trifluoride co-gas for carbon implants Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.