Inventor · Katano, JP

Nobuhiro Jiwari

13Patents
4h-index
8Co-inventors
45Inventor score

Filing activity: Apr 16, 1998 → Jul 17, 2003

Most-cited inventions

PatentTitleAreaCited byStatus
US6251216A Apparatus and method for plasma processing Emerging Cross-Sectional Technologies 52 Expired
US6069092A Dry etching method and semiconductor device fabrication method Electricity 26 Expired
US6057247A Method for fabricating semiconductor device and method for controlling environment inside reaction chamber of dry etching apparatus Electricity 26 Expired
US5989929A Apparatus and method for manufacturing semiconductor device Electricity 14 Expired
US6787445B1 Method for fabricating semiconductor device Electricity 3 Expired
US6518169B1 Semiconductor device and method for fabricating the same Emerging Cross-Sectional Technologies 2 Expired
US6214740A Semiconductor manufacturing apparatus Electricity 2 Expired
US6939806B2 Etching memory Electricity 2 Expired
US7052624B2 Manufacturing method for an electronic device, and the electronic device Electricity 1 Expired
US6669812B2 Apparatus and method for fabricating semiconductor device Electricity 1 Expired
US6703711B2 Semiconductor device and method for fabricating the same Electricity 0 Expired
US6500769B1 Semiconductor device and method for fabricating the same Electricity 0 Expired
US6856020B2 Semiconductor device and method for fabricating the same Emerging Cross-Sectional Technologies 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.