Susumu Aiuchi
23Patents
16h-index
55Co-inventors
84Inventor score
Filing activity: May 25, 1976 → Sep 6, 2002
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US4405435A | Apparatus for performing continuous treatment in vacuum | Emerging Cross-Sectional Technologies | 115 | Expired |
| US4391511A | Light exposure device and method | Emerging Cross-Sectional Technologies | 89 | Expired |
| US4721553A | Method and apparatus for microwave assisting sputtering | Electricity | 80 | Expired |
| US4628531A | Pattern checking apparatus | Physics | 78 | Expired |
| US4610770A | Method and apparatus for sputtering | Electricity | 69 | Expired |
| US4808258A | Plasma processing method and apparatus for carrying out the same | Electricity | 63 | Expired |
| US4401539A | Sputtering cathode structure for sputtering apparatuses, method of controlling magnetic flux generated by said sputtering cathode structure, and method of forming films by use of said sputtering cathode structure | Electricity | 60 | Expired |
| US4675096A | Continuous sputtering apparatus | Chemistry; Metallurgy | 42 | Expired |
| US4479848A | Etching method and apparatus | Electricity | 39 | Expired |
| US4615620A | Apparatus for measuring the depth of fine engraved patterns | Physics | 38 | Expired |
| US4933565A | Method and apparatus for correcting defects of X-ray mask | Physics | 27 | Expired |
| US4925755A | Method of correcting defect in circuit pattern | Physics | 26 | Expired |
| US4420233A | Projecting apparatus | Physics | 22 | Expired |
| US4744660A | Apparatus for measuring difference in shallow level | Physics | 21 | Expired |
| US4487678A | Dry-etching apparatus | Electricity | 19 | Expired |
| US7020306B2 | Polishing pad surface condition evaluation method and an apparatus thereof and a method of producing a semiconductor device | Physics | 17 | Expired |
| US4170418A | Alignment apparatus | Physics | 9 | Expired |
| US4840487A | Measuring apparatus for etching pits | Physics | 8 | Expired |
| US4536419A | Method for forming tapered films | Chemistry; Metallurgy | 6 | Expired |
| USRE33424E | Apparatus and method for measuring the depth of fine engraved patterns | General | 6 | Expired |
| US6539959B1 | Cleaning apparatus for plate-like part and method thereof | Emerging Cross-Sectional Technologies | 4 | Expired |
| US6693699B2 | Image display device and its repairing method and apparatus | Physics | 4 | Expired |
| US6552771B1 | Image display device and its repairing method and apparatus | Physics | 3 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.