Inventor · Hitachinaka, JP

Tadanori Yoshida

17Patents
7h-index
41Co-inventors
62Inventor score

Filing activity: Sep 7, 1999 → Jun 1, 2011

Most-cited inventions

PatentTitleAreaCited byStatus
US6770528B2 Method of forming a data-storing capacitive element made in an insulating film on a semiconductor substrate Electricity 14 Expired
US8476138B2 Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Electricity 11 Active
US7190031B2 Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Electricity 10 Expired
US6764916B1 Manufacturing method for semiconductor device Electricity 7 Expired
US6632721B1 Method of manufacturing semiconductor devices having capacitors with electrode including hemispherical grains Electricity 7 Expired
US6524927B1 Semiconductor device and method of fabricating the same Electricity 7 Expired
US6403479B1 Process for producing semiconductor and apparatus for production Electricity 7 Expired
US6656838B2 Process for producing semiconductor and apparatus for production Electricity 6 Expired
US6717202B2 HSG semiconductor capacitor with migration inhibition layer Electricity 5 Expired
US7972920B2 Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Electricity 5 Active
US7495289B2 Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Electricity 3 Active
US7701020B2 Semiconductor memory device and a method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Electricity 3 Active
US6870224B2 MOS transistor apparatus and method of manufacturing same Electricity 2 Expired
US7161215B2 Semiconductor memory device and method of manufacturing the same, a method of manufacturing a vertical MISFET and a vertical MISFET, and a method of manufacturing a semiconductor device and a semiconductor device Electricity 2 Expired
US6444405B1 Method of forming conductive layers in the trenches or through holes made in an insulating film on a semiconductors substrate Electricity 1 Expired
US6905928B2 MOS transistor apparatus and method of manufacturing same Electricity 1 Expired
US6821871B2 Method for manufacturing semiconductor device, substrate treatment method, and semiconductor manufacturing apparatus Chemistry; Metallurgy 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.