Tetsu Osawa
13Patents
8h-index
13Co-inventors
65Inventor score
Filing activity: Feb 27, 1992 → Apr 17, 2007
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6080965A | Single-substrate-heat-treatment apparatus in semiconductor processing system | Electricity | 43 | Expired |
| US5820367A | Boat for heat treatment | Chemistry; Metallurgy | 34 | Expired |
| US6259061A | Vertical-heat-treatment apparatus with movable lid and compensation heater movable therewith | Electricity | 25 | Expired |
| US5248886A | Processing system | Electricity | 24 | Expired |
| US6510365B1 | Carrier system positioning method | Emerging Cross-Sectional Technologies | 22 | Expired |
| US5357115A | Processing method for wafers | Electricity | 18 | Expired |
| US6372084B1 | Plasma processing apparatus with a dielectric plate having a thickness based on a wavelength of a microwave introduced into a process chamber through the dielectric plate | Chemistry; Metallurgy | 18 | Expired |
| US6123429A | Light source device | Mechanical Engineering; Lighting; Heating | 8 | Expired |
| US7629033B2 | Plasma processing method for forming a silicon nitride film on a silicon oxide film | Electricity | 6 | Active |
| US6656322B2 | Plasma processing apparatus | Electricity | 6 | Expired |
| US6675737B2 | Plasma processing apparatus | Electricity | 5 | Expired |
| US6797111B2 | Plasma processing apparatus | Electricity | 5 | Expired |
| US7393172B1 | Untreated body transfer device and semiconductor manufacturing device with the untreated body transfer device | Emerging Cross-Sectional Technologies | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.