Tomoharu Hase
11Patents
4h-index
2Co-inventors
42Inventor score
Filing activity: Sep 3, 1998 → Nov 29, 2005
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6252648A | Exposure apparatus and method of cleaning optical element of the same | Physics | 45 | Expired |
| US7236239B2 | Illumination system and exposure apparatus | Physics | 8 | Expired |
| US6630985B2 | Exposure apparatus and device manufacturing method including gas purging of a space containing optical components | Physics | 7 | Expired |
| US6853439B1 | Exposure apparatus and device manufacturing method including gas purging of a space containing optical components | Physics | 4 | Expired |
| US6552774B2 | Exposure apparatus | Physics | 4 | Expired |
| US6999159B2 | Exposure apparatus and device manufacturing method including gas purging of a space containing optical components | Physics | 2 | Expired |
| US7119878B2 | Exposure apparatus and method of cleaning optical element of the same | Physics | 1 | Expired |
| US7251014B2 | Exposing method, exposing apparatus and device manufacturing method utilizing them | Physics | 1 | Expired |
| US6967706B2 | Exposure apparatus and device manufacturing method including gas purging of a space containing optical components | Physics | 0 | Expired |
| US7116397B2 | Exposure apparatus and device manufacturing method | Physics | 0 | Expired |
| US7061576B2 | Exposure apparatus and method of cleaning optical element of the same | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.