Volker Becker
28Patents
8h-index
29Co-inventors
71Inventor score
Filing activity: Feb 5, 1998 → Dec 13, 2012
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6214161A | Method and apparatus for anisotropic etching of substrates | Electricity | 30 | Expired |
| US6371434B1 | Spring arrangement apparatus for mounting a vibration-sensitive or shock-sensitive device | Physics | 17 | Expired |
| US7811941B1 | Device and method for etching a substrate using an inductively coupled plasma | Electricity | 16 | Expired |
| US6200822A | Method for detecting the transition between different materials in semiconductor structures | Electricity | 16 | Expired |
| US7052623B1 | Method for processing silicon using etching processes | Performing Operations; Transporting | 11 | Expired |
| US7007783B2 | Axially fixed and adjustable drive plate | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6531031B1 | Plasma etching installation | Electricity | 8 | Expired |
| US6340644B1 | Method for applying a protecting lacquer on a wafer | Electricity | 8 | Expired |
| US6459673B1 | Apparatus for holding in readiness and selecting at least one storage disk | Physics | 6 | Expired |
| US6720273B1 | DEVICE AND METHOD FOR THE HIGH-FREQUENCY ETCHING OF A SUBSTRATE USING A PLASMA ETCHING INSTALLATION AND DEVICE AND METHOD FOR IGNITING A PLASMA AND FOR PULSING THE PLASMA OUT PUT OR ADJUSTING THE SAME UPWARDS | Electricity | 6 | Expired |
| US7785486B2 | Method of etching structures into an etching body using a plasma | Electricity | 5 | Active |
| US6899817B1 | Device and method for etching a substrate using an inductively coupled plasma | Electricity | 5 | Expired |
| US6558559B1 | Method of manufacturing micromechanical surface structures by vapor-phase etching | Performing Operations; Transporting | 4 | Expired |
| US6911348B1 | Device and method for determining the lateral undercut of a structured surface layer | Electricity | 4 | Expired |
| US7863338B2 | Absorbent polymer granulate | Performing Operations; Transporting | 3 | Active |
| US6178152A | Device for playing compact disks | Physics | 3 | Expired |
| US7728045B2 | Process for producing an absorbent polymer by means of spread-drying | Performing Operations; Transporting | 2 | Active |
| US7092326B2 | Player for storage media | Physics | 2 | Expired |
| US6947356B1 | Method for selecting a storage medium | Physics | 2 | Expired |
| US8395809B2 | Positioning device for a color measuring head | Performing Operations; Transporting | 2 | Active |
| US7065007B2 | Method and a playback device for performing a track slip | Physics | 1 | Expired |
| US7094706B2 | Device and method for etching a substrate by using an inductively coupled plasma | Electricity | 0 | Expired |
| US8946090B2 | Method for etching a layer on a silicon semiconductor substrate | Performing Operations; Transporting | 0 | Active |
| US6709546B2 | Device and method for etching a substrate by using an inductively coupled plasma | Electricity | 0 | Expired |
| US7099238B1 | Method of reproducing data in which an accelerated selection may be possible of storage media to be reproduced or to be rejected by a playback device | Physics | 0 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.