Inventor · Marxzell, DE

Volker Becker

28Patents
8h-index
29Co-inventors
71Inventor score

Filing activity: Feb 5, 1998 → Dec 13, 2012

Most-cited inventions

PatentTitleAreaCited byStatus
US6214161A Method and apparatus for anisotropic etching of substrates Electricity 30 Expired
US6371434B1 Spring arrangement apparatus for mounting a vibration-sensitive or shock-sensitive device Physics 17 Expired
US7811941B1 Device and method for etching a substrate using an inductively coupled plasma Electricity 16 Expired
US6200822A Method for detecting the transition between different materials in semiconductor structures Electricity 16 Expired
US7052623B1 Method for processing silicon using etching processes Performing Operations; Transporting 11 Expired
US7007783B2 Axially fixed and adjustable drive plate Emerging Cross-Sectional Technologies 9 Expired
US6531031B1 Plasma etching installation Electricity 8 Expired
US6340644B1 Method for applying a protecting lacquer on a wafer Electricity 8 Expired
US6459673B1 Apparatus for holding in readiness and selecting at least one storage disk Physics 6 Expired
US6720273B1 DEVICE AND METHOD FOR THE HIGH-FREQUENCY ETCHING OF A SUBSTRATE USING A PLASMA ETCHING INSTALLATION AND DEVICE AND METHOD FOR IGNITING A PLASMA AND FOR PULSING THE PLASMA OUT PUT OR ADJUSTING THE SAME UPWARDS Electricity 6 Expired
US7785486B2 Method of etching structures into an etching body using a plasma Electricity 5 Active
US6899817B1 Device and method for etching a substrate using an inductively coupled plasma Electricity 5 Expired
US6558559B1 Method of manufacturing micromechanical surface structures by vapor-phase etching Performing Operations; Transporting 4 Expired
US6911348B1 Device and method for determining the lateral undercut of a structured surface layer Electricity 4 Expired
US7863338B2 Absorbent polymer granulate Performing Operations; Transporting 3 Active
US6178152A Device for playing compact disks Physics 3 Expired
US7728045B2 Process for producing an absorbent polymer by means of spread-drying Performing Operations; Transporting 2 Active
US7092326B2 Player for storage media Physics 2 Expired
US6947356B1 Method for selecting a storage medium Physics 2 Expired
US8395809B2 Positioning device for a color measuring head Performing Operations; Transporting 2 Active
US7065007B2 Method and a playback device for performing a track slip Physics 1 Expired
US7094706B2 Device and method for etching a substrate by using an inductively coupled plasma Electricity 0 Expired
US8946090B2 Method for etching a layer on a silicon semiconductor substrate Performing Operations; Transporting 0 Active
US6709546B2 Device and method for etching a substrate by using an inductively coupled plasma Electricity 0 Expired
US7099238B1 Method of reproducing data in which an accelerated selection may be possible of storage media to be reproduced or to be rejected by a playback device Physics 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.