Inventor · San Jose, CA, US

Wei Liu

31Patents
5h-index
47Co-inventors
69Inventor score

Filing activity: Dec 1, 1998 → May 19, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US6213050A Enhanced plasma mode and computer system for plasma immersion ion implantation Electricity 61 Expired
US6300227A Enhanced plasma mode and system for plasma immersion ion implantation Electricity 46 Expired
US9054048B2 NH3 containing plasma nitridation of a layer on a substrate Electricity 7 Active
US10347492B2 Modifying work function of a metal film with a plasma process Electricity 5 Active
US9177787B2 NH3 containing plasma nitridation of a layer of a three dimensional structure on a substrate Electricity 5 Active
US9831091B2 Plasma treating a process chamber Electricity 4 Active
US11658006B2 Plasma sources and plasma processing apparatus thereof Electricity 3 Active
US10103027B2 Hydrogenation and nitridization processes for modifying effective oxide thickness of a film Electricity 3 Active
USD976001S1 Box for transporting boards General 2 Active
US9048190B2 Methods and apparatus for processing substrates using an ion shield Electricity 2 Active
US10290504B2 Plasma treating a process chamber Electricity 1 Active
US11854770B2 Plasma processing with independent temperature control Electricity 1 Active
US11152221B2 Methods and apparatus for metal silicide deposition Electricity 1 Active
US10504779B2 Hydrogenation and nitridization processes for reducing oxygen content in a film Electricity 0 Active
US11615986B2 Methods and apparatus for metal silicide deposition Electricity 0 Active
US9355820B2 Methods for removing carbon containing films Electricity 0 Active
US12354843B2 Process chamber process kit with protective coating Electricity 0 Active
US9966271B2 Method for modifying epitaxial growth shape Electricity 0 Active
US10431466B2 Hydrogenation and nitridization processes for modifying effective oxide thickness of a film Electricity 0 Active
US12237190B2 Supporting shelf module and wafer container using same Performing Operations; Transporting 0 Active
USD1068700S1 Box for transporting boards General 0 Active
US11987431B2 Top-opening substrate carrier Performing Operations; Transporting 0 Active
US10236207B2 Hydrogenation and nitridization processes for reducing oxygen content in a film Electricity 0 Active
US12272521B2 Plasma sources and plasma processing apparatus thereof Electricity 0 Active
US10510545B2 Hydrogenation and nitridization processes for modifying effective oxide thickness of a film Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.