Inventor · Saratoga Springs, NY, US

Wenhe Lin

28Patents
12h-index
34Co-inventors
77Inventor score

Filing activity: Sep 27, 2000 → Feb 22, 2017

Most-cited inventions

PatentTitleAreaCited byStatus
US6743291B2 Method of fabricating a CMOS device with integrated super-steep retrograde twin wells using double selective epitaxial growth Chemistry; Metallurgy 122 Expired
US6475908B1 Dual metal gate process: metals and their silicides Electricity 62 Expired
US6664156B1 Method for forming L-shaped spacers with precise width control Electricity 56 Expired
US6458695B1 Methods to form dual metal gates by incorporating metals and their conductive oxides Electricity 46 Expired
US6486080B2 Method to form zirconium oxide and hafnium oxide for high dielectric constant materials Electricity 32 Expired
US6709912B1 Dual Si-Ge polysilicon gate with different Ge concentrations for CMOS device optimization Emerging Cross-Sectional Technologies 28 Expired
US6750519B2 Dual metal gate process: metals and their silicides Electricity 25 Expired
US6670248B1 Triple gate oxide process with high-k gate dielectric Electricity 20 Expired
US6534388B1 Method to reduce variation in LDD series resistance Electricity 16 Expired
US6403425B1 Dual gate oxide process with reduced thermal distribution of thin-gate channel implant profiles due to thick-gate oxide Electricity 14 Expired
US7005716B2 Dual metal gate process: metals and their silicides Electricity 13 Expired
US7256084B2 Composite stress spacer Electricity 12 Expired
US7445978B2 Method to remove spacer after salicidation to enhance contact etch stop liner stress on MOS Electricity 11 Expired
US6677652B2 Methods to form dual metal gates by incorporating metals and their conductive oxides Electricity 10 Expired
US6524910B1 Method of forming dual thickness gate dielectric structures via use of silicon nitride layers Electricity 8 Expired
US6891233B2 Methods to form dual metal gates by incorporating metals and their conductive oxides Electricity 8 Expired
US8624329B2 Spacer-less low-K dielectric processes Electricity 5 Active
US6835989B2 Methods to form dual metal gates by incorporating metals and their conductive oxides Electricity 5 Expired
US7999325B2 Method to remove spacer after salicidation to enhance contact etch stop liner stress on MOS Electricity 3 Active
US7977185B2 Method and apparatus for post silicide spacer removal Electricity 3 Expired
US7993997B2 Poly profile engineering to modulate spacer induced stress for device enhancement Electricity 3 Active
US7615427B2 Spacer-less low-k dielectric processes Electricity 3 Active
US8148221B2 Double anneal with improved reliability for dual contact etch stop liner scheme Electricity 3 Active
US7022625B2 Method of fabricating a gate dielectric layer with reduced gate tunnelling current and reduced boron penetration Electricity 2 Expired
US7615433B2 Double anneal with improved reliability for dual contact etch stop liner scheme Electricity 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.