Inventor · Wilmington, MA, US

Yuji Tsukamoto

27Patents
13h-index
25Co-inventors
81Inventor score

Filing activity: Nov 20, 1986 → Oct 13, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7723648B2 Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system Electricity 528 Active
US7297894B1 Method for multi-step temperature control of a substrate Electricity 101 Active
US5868848A Plasma processing apparatus Emerging Cross-Sectional Technologies 82 Expired
US7164236B2 Method and apparatus for improved plasma processing uniformity Electricity 55 Expired
US7230204B2 Method and system for temperature control of a substrate Electricity 44 Expired
US6341053B1 Magnetic tunnel junction elements and their fabrication method Physics 43 Expired
US4856326A Apparatus for measuring an adhesion force of a thin film Physics 42 Expired
US7952049B2 Method for multi-step temperature control of a substrate Electricity 37 Active
US5867677A Switching adapter and method for a computer system Electricity 37 Expired
US6333842A Magneto-resistance effect type composite head and production method thereof Emerging Cross-Sectional Technologies 28 Expired
US4839244A Magnetic recording medium with protective layer using graphite fluoride and method of producing same Emerging Cross-Sectional Technologies 23 Expired
US5781376A Magnetic head with polycrystalline silicon layer on slide running surface Physics 20 Expired
US6700129B1 Electronic board system and coordinates-inputting pen Physics 14 Expired
US6174736A Method of fabricating ferromagnetic tunnel junction device Emerging Cross-Sectional Technologies 11 Expired
US5994035A Method of producing magnetic head slider of the flying type having a protective coating Physics 11 Expired
US8207476B2 Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system Electricity 10 Active
US8034176B2 Gas distribution system for a post-etch treatment system Electricity 9 Active
US5447796A Magnetic recording medium comprising a solid lubrication layer of fullerene carbon having an alkyl or allyl chain Emerging Cross-Sectional Technologies 8 Expired
US6330124A Magnetic disk device using a contact start stop system Physics 6 Expired
US8057633B2 Post-etch treatment system for removing residue on a substrate Electricity 5 Active
US7838800B2 Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing system Mechanical Engineering; Lighting; Heating 4 Active
US6639766B2 Magneto-resistance effect type composite head and production method thereof Emerging Cross-Sectional Technologies 4 Expired
US4758474A Magnetic recording member Emerging Cross-Sectional Technologies 1 Expired
US6181503A Magnetic disk device using a contact start stop system Physics 1 Expired
USD1030089S1 Sample pretreatment device General 1 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.