Yuji Tsukamoto
27Patents
13h-index
25Co-inventors
81Inventor score
Filing activity: Nov 20, 1986 → Oct 13, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7723648B2 | Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system | Electricity | 528 | Active |
| US7297894B1 | Method for multi-step temperature control of a substrate | Electricity | 101 | Active |
| US5868848A | Plasma processing apparatus | Emerging Cross-Sectional Technologies | 82 | Expired |
| US7164236B2 | Method and apparatus for improved plasma processing uniformity | Electricity | 55 | Expired |
| US7230204B2 | Method and system for temperature control of a substrate | Electricity | 44 | Expired |
| US6341053B1 | Magnetic tunnel junction elements and their fabrication method | Physics | 43 | Expired |
| US4856326A | Apparatus for measuring an adhesion force of a thin film | Physics | 42 | Expired |
| US7952049B2 | Method for multi-step temperature control of a substrate | Electricity | 37 | Active |
| US5867677A | Switching adapter and method for a computer system | Electricity | 37 | Expired |
| US6333842A | Magneto-resistance effect type composite head and production method thereof | Emerging Cross-Sectional Technologies | 28 | Expired |
| US4839244A | Magnetic recording medium with protective layer using graphite fluoride and method of producing same | Emerging Cross-Sectional Technologies | 23 | Expired |
| US5781376A | Magnetic head with polycrystalline silicon layer on slide running surface | Physics | 20 | Expired |
| US6700129B1 | Electronic board system and coordinates-inputting pen | Physics | 14 | Expired |
| US6174736A | Method of fabricating ferromagnetic tunnel junction device | Emerging Cross-Sectional Technologies | 11 | Expired |
| US5994035A | Method of producing magnetic head slider of the flying type having a protective coating | Physics | 11 | Expired |
| US8207476B2 | Temperature controlled substrate holder with non-uniform insulation layer for a substrate processing system | Electricity | 10 | Active |
| US8034176B2 | Gas distribution system for a post-etch treatment system | Electricity | 9 | Active |
| US5447796A | Magnetic recording medium comprising a solid lubrication layer of fullerene carbon having an alkyl or allyl chain | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6330124A | Magnetic disk device using a contact start stop system | Physics | 6 | Expired |
| US8057633B2 | Post-etch treatment system for removing residue on a substrate | Electricity | 5 | Active |
| US7838800B2 | Temperature controlled substrate holder having erosion resistant insulating layer for a substrate processing system | Mechanical Engineering; Lighting; Heating | 4 | Active |
| US6639766B2 | Magneto-resistance effect type composite head and production method thereof | Emerging Cross-Sectional Technologies | 4 | Expired |
| US4758474A | Magnetic recording member | Emerging Cross-Sectional Technologies | 1 | Expired |
| US6181503A | Magnetic disk device using a contact start stop system | Physics | 1 | Expired |
| USD1030089S1 | Sample pretreatment device | General | 1 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.