Patent assignee · FR · COMPANY

ASELTA NANOGRAPHICS

16Patents
16Active
16Granted
47Portfolio score

Filing activity: Aug 16, 2012 → Oct 5, 2016

Most-cited patents

PatentTitleAreaCited byStatus
US10534255B2 Method of applying vertex based corrections to a semiconductor design Physics 5 Active
US9922159B2 Free form fracturing method for electronic or optical lithography Electricity 3 Active
US9223926B2 Method for correcting electronic proximity effects using the deconvolution of the pattern to be exposed by means of a probabilistic method Electricity 3 Active
US10295912B2 Method for determining the parameters of an IC manufacturing process model Electricity 2 Active
US10156796B2 Method for determining the parameters of an IC manufacturing process by a differential procedure Physics 1 Active
US10578978B2 Method for determining the dose corrections to be applied to an IC manufacturing process by a matching procedure Physics 1 Active
US8984451B2 Free form fracturing method for electronic or optical lithography Electricity 1 Active
US9224577B2 Method for correcting electronic proximity effects using off-center scattering functions Electricity 1 Active
US10157728B2 Lithography method with combined optimization of the radiated energy and of the geometry applicable to complex shapes Electricity 1 Active
US9542505B2 Method and system for preparing a pattern to be printed on a plate or mask by electron beam lithography Electricity 0 Active
US9891519B2 Free form fracturing method for electronic or optical lithography using resist threshold control Electricity 0 Active
US9934336B2 Method of correcting electron proximity effects using Voigt type scattering functions Electricity 0 Active
US10522328B2 Method of performing dose modulation, in particular for electron beam lithography Electricity 0 Active
US9430597B2 Method for estimating patterns to be printed on a plate or mask by means of electron-beam lithography and corresponding printing device Electricity 0 Active
US10553394B2 Method for the correction of electron proximity effects Electricity 0 Active
US10423074B2 Method for calculating the metrics of an IC manufacturing process Emerging Cross-Sectional Technologies 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.