Patent assignee · US · COMPANY

CVC Products, Inc.

46Patents
0Active
46Granted
38Portfolio score

Filing activity: Jul 29, 1992 → Apr 1, 2002

Most-cited patents

PatentTitleAreaCited byStatus
US6692575B1 Apparatus for supporting a substrate in a reaction chamber Emerging Cross-Sectional Technologies 522 Expired
US5937142A Multi-zone illuminator for rapid thermal processing Electricity 400 Expired
US6136165A Apparatus for inductively-coupled-plasma-enhanced ionized physical-vapor deposition Electricity 153 Expired
US6365502B1 Microelectronic interconnect material with adhesion promotion layer and fabrication method Electricity 94 Expired
US6294836A Semiconductor chip interconnect barrier material and fabrication method Electricity 92 Expired
US6132805A Shutter for thin-film processing equipment Chemistry; Metallurgy 83 Expired
US5976261A Multi-zone gas injection apparatus and method for microelectronics manufacturing equipment Chemistry; Metallurgy 69 Expired
US6051113A Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure using target indexing Chemistry; Metallurgy 63 Expired
US6905578B1 Apparatus and method for multi-target physical-vapor deposition of a multi-layer material structure Chemistry; Metallurgy 61 Expired
US6190732A Method and system for dispensing process gas for fabricating a device on a substrate Emerging Cross-Sectional Technologies 59 Expired
US6444263B1 Method of chemical-vapor deposition of a material Chemistry; Metallurgy 55 Expired
US5715361A Rapid thermal processing high-performance multizone illuminator for wafer backside heating Chemistry; Metallurgy 53 Expired
US5775416A Temperature controlled chuck for vacuum processing Electricity 47 Expired
US6627995B2 Microelectronic interconnect material with adhesion promotion layer and fabrication method Electricity 42 Expired
US6812126B1 Method for fabricating a semiconductor chip interconnect Electricity 38 Expired
US6197166A Method for inductively-coupled-plasma-enhanced ionized physical-vapor deposition Electricity 38 Expired
US6645847B2 Microelectronic interconnect material with adhesion promotion layer and fabrication method Electricity 37 Expired
US6048162A Wafer handler for multi-station tool Emerging Cross-Sectional Technologies 37 Expired
US5936829A Thermally conductive chuck for vacuum processor Emerging Cross-Sectional Technologies 35 Expired
US6461675B2 Method for forming a copper film on a substrate Electricity 34 Expired
US6245655A Method for planarized deposition of a material Electricity 32 Expired
US6039848A Ultra-high vacuum apparatus and method for high productivity physical vapor deposition. Chemistry; Metallurgy 31 Expired
US5746897A High magnetic flux permanent magnet array apparatus and method for high productivity physical vapor deposition Electricity 30 Expired
US6204204A Method and apparatus for depositing tantalum-based thin films with organmetallic precursor Electricity 29 Expired
US6508197B1 Apparatus for dispensing gas for fabricating substrates Emerging Cross-Sectional Technologies 28 Expired

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.