Epsilon Technology Corporation
19Patents
1Active
19Granted
36Portfolio score
Filing activity: Apr 9, 1987 → Apr 27, 2018
Most-cited patents
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5221556A | Gas injectors for reaction chambers in CVD systems | Chemistry; Metallurgy | 665 | Expired |
| US4828224A | Chemical vapor deposition system | Emerging Cross-Sectional Technologies | 485 | Expired |
| US5198034A | Rotatable substrate supporting mechanism with temperature sensing device for use in chemical vapor deposition equipment | Electricity | 262 | Expired |
| US4836138A | Heating system for reaction chamber of chemical vapor deposition equipment | Chemistry; Metallurgy | 113 | Expired |
| US5080549A | Wafer handling system with Bernoulli pick-up | Emerging Cross-Sectional Technologies | 103 | Expired |
| US4975561A | Heating system for substrates | Chemistry; Metallurgy | 63 | Expired |
| US4846102A | Reaction chambers for CVD systems | Chemistry; Metallurgy | 61 | Expired |
| US4813732A | Apparatus and method for automated wafer handling | Emerging Cross-Sectional Technologies | 59 | Expired |
| US5020475A | Substrate handling and transporting apparatus | Chemistry; Metallurgy | 43 | Expired |
| US5092728A | Substrate loading apparatus for a CVD process | Chemistry; Metallurgy | 42 | Expired |
| US5117769A | Drive shaft apparatus for a susceptor | Electricity | 37 | Expired |
| US4996942A | Rotatable substrate supporting susceptor with temperature sensors | Electricity | 33 | Expired |
| US5261960A | Reaction chambers for CVD systems | Chemistry; Metallurgy | 19 | Expired |
| US5318634A | Substrate supporting apparatus | Electricity | 18 | Expired |
| US5096534A | Method for improving the reactant gas flow in a reaction chamber | Chemistry; Metallurgy | 18 | Expired |
| US5156521A | Method for loading a substrate into a GVD apparatus | Chemistry; Metallurgy | 18 | Expired |
| US5044315A | Apparatus for improving the reactant gas flow in a reaction chamber | Chemistry; Metallurgy | 11 | Expired |
| US4993355A | Susceptor with temperature sensing device | Electricity | 9 | Expired |
| US10551169B1 | Positioning system for materials testing | Physics | 4 | Active |
Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.