Patent assignee · FR · COMPANY

LASER SYSTEMS & SOLUTIONS OF EUROPE

13Patents
13Active
13Granted
49Portfolio score

Filing activity: Mar 29, 2010 → Sep 16, 2021 · 1 expiring within 5 years

Most-cited patents

PatentTitleAreaCited byStatus
US9700959B2 Method and apparatus for irradiating a semiconductor material surface by laser energy Electricity 1 Active
US11664246B2 Method for thermally processing a substrate and associated system Electricity 0 Active
US11454543B2 Apparatus and method for measuring the surface temperature of a substrate Physics 0 Active
US10763070B2 Low pressure wire ion plasma discharge source, and application to electron source with secondary emission Electricity 0 Active
US12325085B2 Method and system for uniformly irradiating a frame of a processed substrate Performing Operations; Transporting 0 Active
US9779945B2 Method and apparatus for irradiating a semiconductor material surface by laser energy Electricity 0 Active
US11322358B2 Method of laser irradiation of a patterned semiconductor device Performing Operations; Transporting 0 Active
US10566189B2 Deep junction electronic device and process for manufacturing thereof Electricity 0 Active
US9484703B2 Gas circulation loop for a laser discharge tube Electricity 0 Active
US10020192B2 Method for forming polysilicon Electricity 0 Active
US9601320B2 Method for stabilizing a plasma and an improved ionization chamber Electricity 0 Active
US9396944B2 Method and apparatus for forming a straight line projection on a semiconductor substrate Electricity 0 Active
US12040201B2 System and method to minimize irradiation non uniformity Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Counts and citation impact are objective bibliographic measures.