Inventor · Poughkeepsie, NY, US

Ahmad D. Katnani

32Patents
17h-index
66Co-inventors
84Inventor score

Filing activity: Nov 22, 1991 → May 30, 2018

Most-cited inventions

PatentTitleAreaCited byStatus
US6087064A Silsesquioxane polymers, method of synthesis, photoresist composition, and multilayer lithographic method Emerging Cross-Sectional Technologies 139 Expired
US6210856A Resist composition and process of forming a patterned resist layer on a substrate Physics 59 Expired
US6114082A Frequency doubling hybrid photoresist having negative and positive tone components and method of preparing the same Physics 49 Expired
US6340734B1 Silsesquioxane polymers, method of synthesis, photoresist composition, and multilayer lithographic method Emerging Cross-Sectional Technologies 37 Expired
US5296332A Crosslinkable aqueous developable photoresist compositions and method for use thereof Physics 35 Expired
US5609989A Acid scavengers for use in chemically amplified photoresists Physics 32 Expired
US5955222A Method of making a rim-type phase-shift mask and mask manufactured thereby Physics 29 Expired
US6037097A E-beam application to mask making using new improved KRS resist system Emerging Cross-Sectional Technologies 27 Expired
US6200726A Optimization of space width for hybrid photoresist Emerging Cross-Sectional Technologies 26 Expired
US6365321B1 Blends of hydroxystyrene polymers for use in chemically amplified positive resist formulations Emerging Cross-Sectional Technologies 26 Expired
US6187505A Radiation sensitive silicon-containing resists Physics 25 Expired
US6043003A E-beam application to mask making using new improved KRS resist system Emerging Cross-Sectional Technologies 23 Expired
US6344305B1 Radiation sensitive silicon-containing resists Physics 21 Expired
US6245492A Photoresist system and process for aerial image enhancement Physics 21 Expired
US5919597A Methods for preparing photoresist compositions Emerging Cross-Sectional Technologies 19 Expired
US6284439A "Method of producing an integrated circuit chip using low ""k"" factor hybrid photoresist and apparatus formed thereby" Emerging Cross-Sectional Technologies 18 Expired
US6313492A Integrated circuit chip produced by using frequency doubling hybrid photoresist Physics 18 Expired
US6300035A Chemically amplified positive photoresists Emerging Cross-Sectional Technologies 15 Expired
US6103447A Approach to formulating irradiation sensitive positive resists Emerging Cross-Sectional Technologies 15 Expired
US6440635B1 Low “K” factor hybrid photoresist Emerging Cross-Sectional Technologies 14 Expired
US6190829A "Low ""K"" factor hybrid photoresist" Emerging Cross-Sectional Technologies 12 Expired
US6303263A Irradiation sensitive positive-tone resists using polymers containing two acid sensitive protecting groups Emerging Cross-Sectional Technologies 10 Expired
US6372412B1 Method of producing an integrated circuit chip using frequency doubling hybrid photoresist and apparatus formed thereby Physics 10 Expired
US5733705A Acid Scavengers for use in chemically amplified photoresists Physics 10 Expired
US5667938A Acid scavengers for use in chemically amplified photoresists Physics 9 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.