Akira Yonemizu
20Patents
10h-index
21Co-inventors
67Inventor score
Filing activity: Nov 4, 1994 → Nov 13, 2001
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US5518542A | Double-sided substrate cleaning apparatus | Emerging Cross-Sectional Technologies | 159 | Expired |
| US5964954A | Double-sided substrate cleaning apparatus and cleaning method using the same | Emerging Cross-Sectional Technologies | 69 | Expired |
| US5651160A | Cleaning apparatus for cleaning substrates | Emerging Cross-Sectional Technologies | 51 | Expired |
| US6096233A | Method for wet etching of thin film | Electricity | 44 | Expired |
| US5636401A | Cleaning apparatus and cleaning method | Electricity | 34 | Expired |
| US5685039A | Cleaning apparatus | Human Necessities | 33 | Expired |
| US5858112A | Method for cleaning substrates | Emerging Cross-Sectional Technologies | 27 | Expired |
| US5975097A | Processing apparatus for target processing substrate | Emerging Cross-Sectional Technologies | 19 | Expired |
| US6261365A | Heat treatment method, heat treatment apparatus and treatment system | Electricity | 16 | Expired |
| US5686143A | Resist treating method | Emerging Cross-Sectional Technologies | 15 | Expired |
| US6292972A | Scrub washing apparatus and scrub washing method | Emerging Cross-Sectional Technologies | 10 | Expired |
| US5958145A | Method for washing both surfaces of a substrate | Emerging Cross-Sectional Technologies | 9 | Expired |
| US6173468A | Apparatus for washing both surfaces of a substrate | Emerging Cross-Sectional Technologies | 9 | Expired |
| US5985039A | Apparatus and method for washing both surfaces of a substrate | Emerging Cross-Sectional Technologies | 8 | Expired |
| US6178580A | Processing apparatus | Electricity | 7 | Expired |
| US6652662B1 | Substrate surface processing apparatus and method | Emerging Cross-Sectional Technologies | 4 | Expired |
| US5882426A | Method of cleaning a substrate by scrubbing | Electricity | 4 | Expired |
| US6936134B2 | Substrate processing apparatus and substrate processing method | Emerging Cross-Sectional Technologies | 3 | Expired |
| US6491760B2 | Scrub washing method | Emerging Cross-Sectional Technologies | 2 | Expired |
| US6979474B2 | Heat treatment method, heat treatment apparatus and treatment system | Electricity | 2 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.