Aritoshi Sugimoto
42Patents
14h-index
69Co-inventors
84Inventor score
Filing activity: Mar 4, 1997 → Apr 26, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6734687B1 | Apparatus for detecting defect in device and method of detecting defect | Physics | 113 | Expired |
| US5986263A | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 106 | Expired |
| US6172363A | Method and apparatus for inspecting integrated circuit pattern | Electricity | 96 | Expired |
| US6771077B2 | Method of testing electronic devices indicating short-circuit | Physics | 77 | Expired |
| US6329826A | Method and apparatus for inspecting integrated circuit pattern | Electricity | 56 | Expired |
| US6760472B1 | Identification method for an article using crystal defects | Electricity | 42 | Expired |
| US6583634B1 | Method of inspecting circuit pattern and inspecting instrument | Electricity | 34 | Expired |
| US5877498A | Method and apparatus for X-ray analyses | Electricity | 32 | Expired |
| US6087673A | Method of inspecting pattern and apparatus thereof | Physics | 31 | Expired |
| US6172365A | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 30 | Expired |
| US6960765B2 | Probe driving method, and probe apparatus | Physics | 28 | Expired |
| US6347150B1 | Method and system for inspecting a pattern | Physics | 27 | Expired |
| US6291847A | Semiconductor integrated circuit device and process for manufacturing the same | Electricity | 20 | Expired |
| US6703850B2 | Method of inspecting circuit pattern and inspecting instrument | Electricity | 20 | Expired |
| US6661912B1 | Inspecting method and apparatus for repeated micro-miniature patterns | Physics | 13 | Expired |
| US7417444B2 | Method and apparatus for inspecting integrated circuit pattern | Electricity | 13 | Expired |
| US6373054B1 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 13 | Expired |
| US6559663B2 | Method and apparatus for inspecting integrated circuit pattern | Electricity | 12 | Expired |
| US6365425B1 | Method of manufacturing semiconductor device | Physics | 12 | Expired |
| US7026830B2 | Method and apparatus for inspecting integrated circuit pattern | Electricity | 12 | Expired |
| US7133550B2 | Pattern inspection method and apparatus | Electricity | 9 | Expired |
| US6236057A | Method of inspecting pattern and apparatus thereof with a differential brightness image detection | Physics | 8 | Expired |
| US6717142B2 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 8 | Expired |
| US6970004B2 | Apparatus for inspecting defects of devices and method of inspecting defects | Physics | 8 | Expired |
| US6828554B2 | Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same | Electricity | 6 | Expired |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.