Brian Lue
33Patents
19h-index
54Co-inventors
84Inventor score
Filing activity: Sep 28, 1995 → Mar 29, 2019
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6264467A | Micro grooved support surface for reducing substrate wear and slip formation | Electricity | 478 | Expired |
| US6170428A | Symmetric tunable inductively coupled HDP-CVD reactor | Electricity | 322 | Expired |
| US6108189A | Electrostatic chuck having improved gas conduits | Emerging Cross-Sectional Technologies | 138 | Expired |
| US5761023A | Substrate support with pressure zones having reduced contact area and temperature feedback | Electricity | 122 | Expired |
| US5720818A | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Emerging Cross-Sectional Technologies | 81 | Expired |
| US9471883B2 | Hybrid human machine learning system and method | Physics | 58 | Active |
| US7357842B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 55 | Expired |
| US6077357A | Orientless wafer processing on an electrostatic chuck | Electricity | 52 | Expired |
| US6721162B2 | Electrostatic chuck having composite dielectric layer and method of manufacture | Emerging Cross-Sectional Technologies | 51 | Expired |
| US5748434A | Shield for an electrostatic chuck | Electricity | 50 | Expired |
| US7925377B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 32 | Active |
| US6414834B1 | Dielectric covered electrostatic chuck | Emerging Cross-Sectional Technologies | 29 | Expired |
| US7221553B2 | Substrate support having heat transfer system | Electricity | 28 | Expired |
| US5876119A | In-situ substrate temperature measurement scheme in plasma reactor | Physics | 28 | Expired |
| US7694647B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 28 | Active |
| US7743728B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 27 | Active |
| US5904776A | Conduits for flow of heat transfer fluid to the surface of an electrostatic chuck | Emerging Cross-Sectional Technologies | 25 | Expired |
| US5644467A | Method and structure for improving gas breakdown resistance and reducing the potential of arcing in a electrostatic chuck | Electricity | 20 | Expired |
| US9213997B2 | Method and system for social media burst classifications | Physics | 19 | Active |
| US5715132A | Method and structure for improving gas breakdown resistance and reducing the potential of arcing in an electrostatic chuck | Electricity | 16 | Expired |
| US6175485A | Electrostatic chuck and method for fabricating the same | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6667527B2 | Temperature sensor with shell | Physics | 8 | Expired |
| US8550031B2 | Cluster tool architecture for processing a substrate | Emerging Cross-Sectional Technologies | 6 | Active |
| US8279577B2 | Substrate support having fluid channel | Emerging Cross-Sectional Technologies | 5 | Active |
| US7768765B2 | Substrate support having heat transfer system | Electricity | 5 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.