Inventor · Singapore, SG

Daniel Yen

22Patents
10h-index
33Co-inventors
71Inventor score

Filing activity: Apr 19, 1990 → Jan 12, 2004

Most-cited inventions

PatentTitleAreaCited byStatus
US5003062A Semiconductor planarization process for submicron devices Emerging Cross-Sectional Technologies 121 Expired
US6632712B1 Method of fabricating variable length vertical transistors Electricity 49 Expired
US6576526B2 Darc layer for MIM process integration Electricity 47 Expired
US5883001A Integrated circuit passivation process and structure Emerging Cross-Sectional Technologies 33 Expired
US6468851B1 Method of fabricating CMOS device with dual gate electrode Electricity 24 Expired
US5106787A Method for high vacuum controlled ramping curing furnace for SOG planarization Electricity 23 Expired
US6630380B1 Method for making three-dimensional metal-insulator-metal capacitors for dynamic random access memory (DRAM) and ferroelectric random access memory (FERAM) Electricity 22 Expired
US6004622A Spin-on-glass process with controlled environment Electricity 15 Expired
US5716673A Spin-on-glass process with controlled environment Electricity 13 Expired
US7067869B2 Adjustable 3D capacitor Electricity 12 Expired
US6429109B1 Method to form high k dielectric and silicide to reduce poly depletion by using a sacrificial metal between oxide and gate Electricity 10 Expired
US6610575B1 Forming dual gate oxide thickness on vertical transistors by ion implantation Electricity 8 Expired
US6841441B2 Method to produce dual gates (one metal and one poly or metal silicide) for CMOS devices using sputtered metal deposition, metallic ion implantation, or silicon implantation, and laser annealing Electricity 8 Expired
US6664153B2 Method to fabricate a single gate with dual work-functions Electricity 7 Expired
US6713335B2 Method of self-aligning a damascene gate structure to isolation regions Electricity 7 Expired
US5174043A Machine and method for high vacuum controlled ramping curing furnace for sog planarization Electricity 5 Expired
US6610604B1 Method of forming small transistor gates by using self-aligned reverse spacer as a hard mask Electricity 5 Expired
US6689643B2 Adjustable 3D capacitor Electricity 3 Expired
US6544848B1 Method to form an asymmetrical non-volatile memory device using small in-situ doped polysilicon spacers Electricity 3 Expired
US6803305B2 Method for forming a via in a damascene process Electricity 2 Expired
US6686279B2 Method for reducing gouging during via formation Electricity 2 Expired
US6828082B2 Method to pattern small features by using a re-flowable hard mask Electricity 0 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.