Inventor · Austin, TX, US

Eric M. Lee

30Patents
11h-index
26Co-inventors
71Inventor score

Filing activity: May 27, 2003 → Nov 15, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US7858533B2 Method for curing a porous low dielectric constant dielectric film Electricity 499 Active
US7977256B2 Method for removing a pore-generating material from an uncured low-k dielectric film Electricity 484 Active
US7622378B2 Multi-step system and method for curing a dielectric film Electricity 456 Active
US8642488B2 Multi-step system and method for curing a dielectric film Electricity 451 Active
US9443725B2 Multi-step system and method for curing a dielectric film Electricity 449 Active
US9184047B2 Multi-step system and method for curing a dielectric film Electricity 449 Active
US8895942B2 Dielectric treatment module using scanning IR radiation source Chemistry; Metallurgy 38 Active
US8852347B2 Apparatus for chemical vapor deposition control Electricity 36 Active
US9139910B2 Method for chemical vapor deposition control Chemistry; Metallurgy 35 Active
US7115993B2 Structure comprising amorphous carbon film and method of forming thereof Electricity 23 Expired
US7901743B2 Plasma-assisted vapor phase treatment of low dielectric constant films using a batch processing system Electricity 12 Active
US7855123B2 Method of integrating an air gap structure with a substrate Electricity 11 Active
US7405168B2 Plural treatment step process for treating dielectric films Electricity 10 Expired
US9157152B2 Vapor deposition system Chemistry; Metallurgy 9 Active
US7199046B2 Structure comprising tunable anti-reflective coating and method of forming thereof Electricity 7 Expired
US9212420B2 Chemical vapor deposition method Chemistry; Metallurgy 5 Active
US8039049B2 Treatment of low dielectric constant films using a batch processing system Electricity 3 Active
US10599602B2 Bimodal phy for low latency in high speed interconnects Physics 3 Active
US10963415B2 Bimodal PHY for low latency in high speed interconnects Physics 1 Active
US8916055B2 Method and device for controlling pattern and structure formation by an electric field Electricity 1 Active
US10068765B2 Multi-step system and method for curing a dielectric film Electricity 1 Active
US8956457B2 Thermal processing system for curing dielectric films Electricity 0 Active
US11823124B2 Inventory management and delivery through image and data integration Performing Operations; Transporting 0 Active
US11354264B2 Bimodal PHY for low latency in high speed interconnects Physics 0 Active
US11720854B2 Inventory management through image and data integration Physics 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.