Inventor · San Jose, CA, US

Feng Chen

14Patents

1h-index

37Co-inventors

43Inventor score

Filing activity: Jun 7, 2019 → Dec 19, 2022

Most-cited inventions

Patent	Title	Area	Cited by	Status
US11164780B2	Process integration approach for selective metal via fill	Electricity	1	Active
US11586160B2	Reducing substrate surface scratching using machine learning	Physics	1	Active
US11764157B2	Ruthenium liner and cap for back-end-of-line applications	Electricity	0	Active
US11527437B2	Methods and apparatus for intermixing layer for enhanced metal reflow	Electricity	0	Active
US12148660B2	Low resistance and high reliability metallization module	Electricity	0	Active
US12211743B2	Method of forming a metal liner for interconnect structures	Electricity	0	Active
US11587873B2	Binary metal liner layers	Electricity	0	Active
US12431358B2	Methods and materials for enhanced barrier performance and reduced via resistance	Electricity	0	Active
US11835927B2	Reducing substrate surface scratching using machine learning	Physics	0	Active
US11784127B2	Ruthenium liner and cap for back-end-of-line	Electricity	0	Active
US12157943B2	Methods of selective deposition	Electricity	0	Active
US11955382B2	Reverse selective etch stop layer	Electricity	0	Active
US11939666B2	Methods and apparatus for precleaning and treating wafer surfaces	Electricity	0	Active
US11171046B2	Methods for forming cobalt and ruthenium capping layers for interconnect structures	Electricity	0	Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.