Inventor · Steenokkerzeel, BE

Frank Holsteyns

12Patents
3h-index
20Co-inventors
56Inventor score

Filing activity: May 6, 2003 → Oct 7, 2021

Most-cited inventions

PatentTitleAreaCited byStatus
US9044794B2 Ultrasonic cleaning fluid, method and apparatus Electricity 6 Active
US7016028B2 Method and apparatus for defect detection Physics 4 Expired
US7527698B2 Method and apparatus for removing a liquid from a surface of a substrate Emerging Cross-Sectional Technologies 3 Expired
US8202369B2 Method and apparatus for controlled transient cavitation Emerging Cross-Sectional Technologies 2 Active
US8486199B2 Ultrasonic cleaning method and apparatus Electricity 1 Active
US11476162B2 Method for dicing a semiconductor substrate into a plurality of dies Electricity 1 Active
US8691022B1 Method and apparatus for processing wafer-shaped articles Electricity 1 Active
US8551251B2 Ultrasonic treatment method and apparatus Electricity 0 Active
US9662686B2 Ultrasonic cleaning method and apparatus Electricity 0 Active
US11906946B2 System and method for controlling directionality of fast-wet etching of crystalline silicon, c-Si Electricity 0 Active
US9548221B2 Method and apparatus for processing wafer-shaped articles Electricity 0 Active
US11031253B2 Etching using an electrolyzed chloride solution Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.