Inventor · Emmerting, DE

Gerhard Brehm

10Patents
7h-index
17Co-inventors
59Inventor score

Filing activity: Jul 2, 1986 → Jul 9, 1996

Most-cited inventions

PatentTitleAreaCited byStatus
US4739589A Process and apparatus for abrasive machining of a wafer-like workpiece Performing Operations; Transporting 69 Expired
US4968381A Method of haze-free polishing for semiconductor wafers Electricity 48 Expired
US4973563A Process for preserving the surface of silicon wafers Electricity 34 Expired
US4971654A Process and apparatus for etching semiconductor surfaces Electricity 31 Expired
US4844047A Process for sawing crystal rods or blocks into thin wafers Performing Operations; Transporting 20 Expired
US4811722A Process for sharpening cutting-off tools and cutting-off process Performing Operations; Transporting 13 Expired
US5710077A Method for the generation of stacking-fault-induced damage on the back of semiconductor wafers Electricity 7 Expired
US5030910A Method and apparatus for slicing crystalline wafers aided by magnetic field monitoring means Emerging Cross-Sectional Technologies 6 Expired
US4900363A Method and liquid preparation for removing residues of auxiliary sawing materials from wafers Chemistry; Metallurgy 5 Expired
US5164323A Process for the surface treatment of semiconductor slices Electricity 3 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.