Hidehiro Yanai
18Patents
3h-index
19Co-inventors
53Inventor score
Filing activity: Jun 15, 2005 → Jul 14, 2021
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US10287684B2 | Substrate processing apparatus | Chemistry; Metallurgy | 322 | Active |
| US7648578B1 | Substrate processing apparatus, and method for manufacturing semiconductor device | Electricity | 14 | Expired |
| US9911580B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 3 | Active |
| US8444363B2 | Substrate processing apparatus | Electricity | 3 | Active |
| US8986450B1 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 3 | Active |
| US9508546B2 | Method of manufacturing semiconductor device | Electricity | 3 | Active |
| US10763084B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 2 | Active |
| US8925562B1 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 2 | Active |
| US7579276B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Chemistry; Metallurgy | 2 | Expired |
| US11101111B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 1 | Active |
| US9659767B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Electricity | 1 | Active |
| US10403478B2 | Plasma processing apparatus and method of manufacturing semiconductor device | Electricity | 0 | Active |
| US11530481B2 | Substrate processing apparatus, method of manufacturing semiconductor device and non-transitory computer-readable recording medium | Electricity | 0 | Active |
| US7923380B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US9378991B2 | Substrate processing apparatus and substrate processing method | Electricity | 0 | Active |
| US9076644B2 | Substrate processing apparatus, substrate supporter and method of manufacturing semiconductor device | Electricity | 0 | Active |
| US11948778B2 | Substrate processing apparatus, method of manufacturing semiconductor device, and baffle structure of the substrate processing apparatus | Electricity | 0 | Active |
| US9082797B2 | Substrate processing apparatus and method of manufacturing semiconductor device | Mechanical Engineering; Lighting; Heating | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.