Hitoshi Itoh
41Patents
11h-index
42Co-inventors
75Inventor score
Filing activity: Nov 18, 1977 → Jan 26, 2018
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US6287988A | Semiconductor device manufacturing method, semiconductor device manufacturing apparatus and semiconductor device | Electricity | 489 | Expired |
| US4817558A | Thin-film depositing apparatus | Chemistry; Metallurgy | 75 | Expired |
| US6013575A | Method of selectively depositing a metal film | Electricity | 48 | Expired |
| US5580615A | Method of forming a conductive film on an insulating region of a substrate | Electricity | 28 | Expired |
| US4144074A | Inorganic coating composition | Chemistry; Metallurgy | 26 | Expired |
| US6165916A | Film-forming method and film-forming apparatus | Electricity | 24 | Expired |
| US5223455A | Method of forming refractory metal film | Electricity | 18 | Expired |
| US8242015B2 | Film forming method and film forming apparatus | Electricity | 17 | Active |
| US6252272A | Semiconductor device, and method of fabricating the same | Electricity | 16 | Expired |
| US5990007A | Method of manufacturing a semiconductor device | Electricity | 14 | Expired |
| US5620925A | Method of manufacturing semiconductor device using a hagolen plasma treatment step | Electricity | 12 | Expired |
| US5498306A | Method and apparatus for manufacturing ink jet recording head | Performing Operations; Transporting | 10 | Expired |
| US8247321B2 | Method of manufacturing semiconductor device, semiconductor device, electronic instrument, semiconductor manufacturing apparatus, and storage medium | Electricity | 9 | Active |
| US8354337B2 | Metal oxide film formation method and apparatus | Electricity | 6 | Active |
| US7278595B2 | Particle feed apparatus for jet mill | Performing Operations; Transporting | 6 | Expired |
| US8619278B2 | Printed matter examination apparatus, printed matter examination method, and printed matter examination system | Physics | 6 | Active |
| US8610353B2 | Plasma generating apparatus, plasma processing apparatus and plasma processing method | Electricity | 5 | Active |
| US5467725A | Thread spreading apparatus for use in overlock sewing machine | Textiles; Paper | 5 | Expired |
| US4957880A | Method for producing semiconductor device including a refractory metal pattern | Emerging Cross-Sectional Technologies | 5 | Expired |
| US8314004B2 | Semiconductor device manufacturing method | Electricity | 4 | Active |
| US8634108B2 | Method and apparatus for inspecting image, image forming apparatus, and computer-readable recording medium storing image inspecting program | Physics | 3 | Active |
| US8765221B2 | Film forming method and film forming apparatus | Electricity | 3 | Active |
| US7639880B2 | Compressing a multivalue image with control of memory space requirement | Electricity | 3 | Active |
| US8349725B2 | Method of manufacturing semiconductor device, semiconductor manufacturing apparatus, and storage medium | Electricity | 3 | Active |
| US8029856B2 | Film formation method and apparatus | Chemistry; Metallurgy | 3 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.