Kohei Fukushima
22Patents
4h-index
28Co-inventors
63Inventor score
Filing activity: Feb 6, 2002 → Dec 16, 2022
Most-cited inventions
| Patent | Title | Area | Cited by | Status |
|---|---|---|---|---|
| US7758920B2 | Method and apparatus for forming silicon-containing insulating film | Electricity | 76 | Active |
| US7825039B2 | Vertical plasma processing method for forming silicon containing film | Chemistry; Metallurgy | 75 | Active |
| US7156923B2 | Silicon nitride film forming method, silicon nitride film forming system and silicon nitride film forming system precleaning method | Emerging Cross-Sectional Technologies | 10 | Expired |
| US6844273B2 | Precleaning method of precleaning a silicon nitride film forming system | Emerging Cross-Sectional Technologies | 8 | Expired |
| US8336490B2 | Plasma processing apparatus | Electricity | 4 | Active |
| USD786810S1 | Dummy wafer | General | 4 | Active |
| US10475641B2 | Substrate processing apparatus | Electricity | 3 | Active |
| US7462376B2 | CVD method for forming silicon nitride film | Electricity | 3 | Expired |
| US10287682B2 | Substrate processing apparatus, gas supply method, substrate processing method, and film forming method | Chemistry; Metallurgy | 2 | Active |
| US8608902B2 | Plasma processing apparatus | Electricity | 2 | Active |
| USD784937S1 | Dummy wafer | General | 2 | Active |
| US9970111B2 | Substrate processing apparatus having ground electrode | Electricity | 1 | Active |
| US9624579B2 | Film forming apparatus, film forming method, and non-transitory computer-readable storage medium | Electricity | 1 | Active |
| US9789579B2 | Apparatus for detecting rammer tip-over | Emerging Cross-Sectional Technologies | 1 | Active |
| US11560628B2 | Substrate processing method and substrate processing apparatus | Electricity | 1 | Active |
| USD785576S1 | Dummy wafer | General | 1 | Active |
| US12054828B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US12281389B2 | Substrate processing method and substrate processing apparatus | Electricity | 0 | Active |
| US11208721B2 | Substrate processing apparatus | Electricity | 0 | Active |
| US11282721B2 | Vertical heat treatment apparatus | Electricity | 0 | Active |
| US9776202B2 | Driving method of vertical heat treatment apparatus, storage medium and vertical heat treatment apparatus | Electricity | 0 | Active |
| US9487859B2 | Operating method of vertical heat treatment apparatus, storage medium, and vertical heat treatment apparatus | Chemistry; Metallurgy | 0 | Active |
Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.