Inventor · Andover, MA, US

Kyu-Ha Shim

16Patents
2h-index
56Co-inventors
53Inventor score

Filing activity: Sep 23, 2006 → Feb 9, 2022

Most-cited inventions

PatentTitleAreaCited byStatus
US7993698B2 Techniques for temperature controlled ion implantation Electricity 4 Active
US10332748B2 Etch rate modulation through ion implantation Emerging Cross-Sectional Technologies 2 Active
US8283265B2 Method to enhance charge trapping Electricity 2 Active
US9934982B2 Etch rate modulation through ion implantation Emerging Cross-Sectional Technologies 2 Active
US8716155B2 Method to enhance charge trapping Electricity 2 Active
US10354875B1 Techniques for improved removal of sacrificial mask Electricity 1 Active
US8012843B2 Optimized halo or pocket cold implants Electricity 1 Active
US10811257B2 Techniques for forming low stress etch-resistant mask using implantation Electricity 1 Active
US11114299B2 Techniques for reducing tip to tip shorting and critical dimension variation during nanoscale patterning Electricity 0 Active
US12142475B2 Sequential plasma and thermal treatment Electricity 0 Active
US11594441B2 Handling for high resistivity substrates Chemistry; Metallurgy 0 Active
US11728383B2 Localized stressor formation by ion implantation Electricity 0 Active
US10930508B2 Replacement metal gate formation of PMOS ultra-low voltage devices using a thermal implant Electricity 0 Active
US10204909B2 Non-uniform gate oxide thickness for DRAM device Electricity 0 Active
US12094709B2 Plasma treatment process to densify oxide layers Electricity 0 Active
US11664419B2 Isolation method to enable continuous channel layer Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.