Inventor · Tokyo, JP

Masaki Narita

32Patents
15h-index
68Co-inventors
84Inventor score

Filing activity: Jun 30, 1988 → Mar 9, 2015

Most-cited inventions

PatentTitleAreaCited byStatus
US6025117A Method of forming a pattern using polysilane Physics 348 Expired
US5444207A Plasma generating device and surface processing device and method for processing wafers in a uniform magnetic field Electricity 85 Expired
US5786594A Multi-beam pitch adjustment system and method Electricity 76 Expired
US5753907A Multiple beam scanning apparatus Electricity 37 Expired
US5660744A Plasma generating apparatus and surface processing apparatus Electricity 37 Expired
US4912563A Electrophotographic image forming apparatus having replaceable optical unit Physics 34 Expired
US6270948A Method of forming pattern Electricity 31 Expired
US5460143A Fault-diagnosing device for evaporation system Mechanical Engineering; Lighting; Heating 25 Expired
US5976986A Low pressure and low power C1.sub.2 /HC1 process for sub-micron metal etching Chemistry; Metallurgy 25 Expired
US5610724A Image forming system Physics 21 Expired
US6560414B2 Reusable photoreceptor and image forming apparatus using the reusable photoreceptor and method of reusing photoreceptor Emerging Cross-Sectional Technologies 20 Expired
US6014963A Method and apparatus for controlling the air-fuel ratio in an internal combustion engine Mechanical Engineering; Lighting; Heating 19 Expired
US5846884A Methods for metal etching with reduced sidewall build up during integrated circuit manufacturing Electricity 18 Expired
US5926203A Image recording method and apparatus using multiple laser beams Performing Operations; Transporting 17 Expired
US6383942B1 Dry etching method Electricity 16 Expired
US5337725A Self-diagnostic apparatus for exhaust gas recirculating apparatus Mechanical Engineering; Lighting; Heating 14 Expired
US6274507A Plasma processing apparatus and method Emerging Cross-Sectional Technologies 13 Expired
US5879863A Pattern forming method Physics 9 Expired
US6333246A Semiconductor device manufacturing method using electrostatic chuck and semiconductor device manufacturing system Electricity 9 Expired
US6763208B2 Photoreceptor regenerating apparatus and image forming apparatus using regenerated photoreceptor and method of regenerating photoreceptor Physics 9 Expired
US6376347B1 Method of making gate wiring layer over semiconductor substrate Electricity 8 Expired
US5411007A Air-fuel ratio control apparatus of internal combustion engine Mechanical Engineering; Lighting; Heating 7 Expired
US7732338B2 Method of fabricating semiconductor device with reduced pitch Electricity 6 Active
US6911398B2 Method of sequentially processing a plurality of lots each including semiconductor substrates Electricity 4 Expired
US6685797B2 Semiconductor device manufacturing system for etching a semiconductor by plasma discharge Electricity 4 Expired

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.