Inventor · Radebeul, DE

Michael Grillberger

13Patents
5h-index
13Co-inventors
55Inventor score

Filing activity: Jul 1, 2008 → Mar 9, 2016

Most-cited inventions

PatentTitleAreaCited byStatus
US8598714B2 Semiconductor device comprising through hole vias having a stress relaxation mechanism Electricity 11 Active
US8399335B2 Sophisticated metallization systems in semiconductors formed by removing damaged dielectric layers after forming the metal features Electricity 7 Active
US8357610B2 Reducing patterning variability of trenches in metallization layer stacks with a low-k material by reducing contamination of trench dielectrics Electricity 5 Active
US7982313B2 Semiconductor device including stress relaxation gaps for enhancing chip package interaction stability Electricity 5 Active
US8080866B2 3-D integrated semiconductor device comprising intermediate heat spreading capabilities Electricity 5 Active
US8497583B2 Stress reduction in chip packaging by a stress compensation region formed around the chip Electricity 5 Active
US8479578B2 Assessing metal stack integrity in sophisticated semiconductor devices by mechanically stressing die contacts Electricity 4 Active
US8482123B2 Stress reduction in chip packaging by using a low-temperature chip-package connection regime Electricity 1 Active
US10014279B2 Methods of forming 3-D integrated semiconductor devices having intermediate heat spreading capabilities Electricity 1 Active
US7829357B2 Method and test structure for monitoring CMP processes in metallization layers of semiconductor devices Electricity 1 Active
US8501545B2 Reduction of mechanical stress in metal stacks of sophisticated semiconductor devices during die-substrate soldering by an enhanced cool down regime Electricity 1 Active
US9318468B2 3-D integrated semiconductor device comprising intermediate heat spreading capabilities Electricity 1 Active
US8920027B2 Assessing thermal mechanical characteristics of complex semiconductor devices by integrated heating systems Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.