Inventor · Chengdu, CN

Mingbo Pu

13Patents
1h-index
26Co-inventors
46Inventor score

Filing activity: Sep 23, 2014 → Mar 30, 2023

Most-cited inventions

PatentTitleAreaCited byStatus
US9958784B2 Super-resolution imaging photolithography Physics 2 Active
US12228710B1 Ultra-wide angle broadband polarization imaging system based on metasurface, and detection apparatus Physics 0 Active
US12092960B2 Mask topology optimization method and system for surface plasmon near-field photolithography Physics 0 Active
US11754352B2 Visible light-transparent and radiative-cooling multilayer film Performing Operations; Transporting 0 Active
US12078937B1 Near-field lithography immersion system, immersion unit and interface module thereof Physics 0 Active
US11061330B2 Methods and apparatuses for coating photoresist Electricity 0 Active
US11675273B2 Method of fabricating micro-nano structure Physics 0 Active
US11868055B2 Multifunctional lithography device Physics 0 Active
US11724962B2 Method for etching curved substrate Electricity 0 Active
US11714358B2 Intelligent correction device control system for super-resolution lithography precision mask Electricity 0 Active
US11592602B2 Sub-wavelength structural material having patch type array and compatibility of low detectability for infrared, laser, and microwave Electricity 0 Active
US12306424B2 Metasurface-based imaging system, design method, and detector Physics 0 Active
US12272530B2 Ultra-large area scanning reactive ion etching machine and etching method thereof Electricity 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.