Inventor · Unterhaching, DE

Peter Weigand

21Patents
9h-index
23Co-inventors
75Inventor score

Filing activity: Feb 6, 1989 → Nov 17, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US5851899A Gapfill and planarization process for shallow trench isolation Electricity 65 Expired
US5937541A Semiconductor wafer temperature measurement and control thereof using gas temperature measurement Electricity 37 Expired
US6046503A Metalization system having an enhanced thermal conductivity Electricity 36 Expired
US6406545B2 Semiconductor workpiece processing apparatus and method Electricity 28 Expired
US6252292A Vertical electrical cavity-fuse Electricity 27 Expired
US5854126A Method for forming metallization in semiconductor devices with a self-planarizing material Electricity 22 Expired
US5415256A Friction type torque-limiting clutch brake which splits into halves for easy replacement Emerging Cross-Sectional Technologies 13 Expired
US10298898B2 User feedback for real-time checking and improving quality of scanned image Physics 11 Active
US6150072A Method of manufacturing a shallow trench isolation structure for a semiconductor device Electricity 10 Expired
US5899736A Techniques for forming electrically blowable fuses on an integrated circuit Electricity 8 Expired
US5992046A Semiconductor wafer temperature measurement and control thereof using gas temperature measurement Electricity 7 Expired
US5926716A Method for forming a structure Electricity 7 Expired
US10841551B2 User feedback for real-time checking and improving quality of scanned image Physics 7 Active
US6492282B1 Integrated circuits and manufacturing methods Electricity 7 Expired
US5963837A Method of planarizing the semiconductor structure Electricity 6 Expired
US6136709A Metal line deposition process Electricity 5 Expired
US4952108A Apparatus for automatically feeding a sequence of crucibles to a test oven Physics 5 Expired
US5977635A Multi-level conductive structure including low capacitance material Electricity 3 Expired
US11563926B2 User feedback for real-time checking and improving quality of scanned image Physics 2 Active
US6015988A Microstructure and methods for fabricating such structure Electricity 0 Expired
US9758291B2 Port arrangement for an internal component Performing Operations; Transporting 0 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.