Inventor · Ebina, JP

Satoshi Toriumi

62Patents
11h-index
46Co-inventors
78Inventor score

Filing activity: Mar 22, 2000 → Jun 18, 2020

Most-cited inventions

PatentTitleAreaCited byStatus
US7833845B2 Manufacturing method of semiconductor device Electricity 36 Active
US7611930B2 Method of manufacturing display device Electricity 35 Active
US6858898B1 Semiconductor device and method for manufacturing the same Electricity 33 Expired
US7064388B2 Semiconductor device and method for manufacturing the same Electricity 29 Expired
US6703265B2 Semiconductor device and method of manufacturing the same Electricity 25 Expired
US6875674B2 Method of manufacturing a semiconductor device with fluorine concentration Electricity 25 Expired
US8263421B2 Manufacturing method of semiconductor device Electricity 24 Active
US10147747B2 Semiconductor device, manufacturing method thereof, and electronic device Electricity 19 Active
US6794229B2 Manufacturing method for semiconductor device Electricity 19 Expired
US9054206B2 Method for manufacturing semiconductor device Electricity 14 Active
US9450102B2 Semiconductor device and method for manufacturing the same Electricity 11 Active
US7897482B2 Semiconductor device and manufacturing method thereof Electricity 10 Active
US7208394B2 Method of manufacturing a semiconductor device with a fluorine concentration Electricity 9 Expired
US9478664B2 Semiconductor device Electricity 9 Active
US10050132B2 Method for manufacturing semiconductor device Electricity 9 Active
US7670881B2 Method of manufacturing a semiconductor device Electricity 8 Active
US10693013B2 Semiconductor device and manufacturing method of the same Electricity 8 Active
US7368335B2 Semiconductor device and method of manufacturing the same Electricity 8 Active
US9722056B2 Method for manufacturing semiconductor device Electricity 7 Active
US9882061B2 Semiconductor device and manufacturing method thereof Electricity 7 Active
US8304327B2 Method of manufacturing a semiconductor device Electricity 7 Active
US7888167B2 Photoelectric conversion device and method for manufacturing the same Emerging Cross-Sectional Technologies 6 Active
US8603899B2 Method of manufacturing a semiconductor device Electricity 6 Active
US8591650B2 Method for forming crystalline semiconductor film, method for manufacturing thin film transistor, and method for manufacturing display device Chemistry; Metallurgy 5 Active
US7821071B2 Semiconductor device and method for manufacturing the same Electricity 5 Active

Source: USPTO / EPO open patent data. Inventor disambiguation is heuristic; counts are objective bibliographic measures.